Polymer, Resist Composition and Patterning Process

专利摘要:
PURPOSE: A polymer compound, a resist material containing the polymer compound and a method for forming pattern using the resist material are provided, to improve the sensitivity to a high energy ray, the resolution and the etching resistance of the resist material and to allow the pattern vertical to a substrate to be formed easily. CONSTITUTION: The polymer compound comprises the repeating unit represented by the formula 1-1 or 1-2 and has a mass average molecular weight of 1,000-500,000, wherein R1 is H, or a straight, branched or cyclic alkyl group of C1-C6; R2 is H or an acyl or alkoxycarbonyl group of C1-C15, and some or all of the hydrogen atoms of the carbon atoms can be substituted with a halogen atom; Y is a divalent group of C1-C15 and forms a cyclic form with the bonding atoms; k is 0 or 1; and m is an integer of 0-5. The method comprises the steps of coating the resist material onto a substrate; exposing the substrate to a high energy ray or an electron ray through a photo mask after heating; and developing it optional after heating.
公开号:KR20020036755A
申请号:KR1020010069716
申请日:2001-11-09
公开日:2002-05-16
发明作者:세이이찌로 다찌바나；므쯔오 나까시마；쯔네히로 니시；다께시 긴쇼；고지 하세가와；다께루 와따나베；준 하따께야마
申请人:카나가와 치히로；신에쓰 가가꾸 고교 가부시끼가이샤；
IPC主号:

专利说明:

Polymer compound, resist material, and pattern forming method {Polymer, Resist Composition and Patterning Process}
[1] The present invention relates to (1) a polymer compound containing a specific repeating unit, (2) a resist material containing the polymer compound as a base resin, and (3) a pattern forming method using the resist material.
[2] In recent years, finer pattern rule has been required due to higher integration and higher speed of LSI, and far ultraviolet lithography has been promising as a next generation fine processing technology. Among them, photolithography using KrF excimer laser light and ArF excimer laser light as a light source is an indispensable technique for ultrafine processing of 0.3 μm or less, and its implementation is urgently desired.
[3] In the resist material for KrF excimer laser, polyhydroxystyrene, which has a practical level of transparency and etching resistance, is a de facto standard base resin. In ArF excimer laser resist materials, materials such as polyacrylic acid, polymethacrylic acid derivatives, and polymer compounds containing aliphatic cyclic compounds in the main chain have been examined, but there are advantages and disadvantages to these, and no standard base resin has yet been determined. to be.
[4] That is, in the case of a resist material using a derivative of polyacrylic acid or poly methacrylic acid, there is an advantage of high reactivity of the acid-decomposable group and excellent substrate adhesion, and relatively good results can be obtained with respect to sensitivity and resolution, but the main chain of the resin is weak. Therefore, the etching resistance is extremely low and not practical. On the other hand, in the case of a resist material using a polymer compound containing an aliphatic cyclic compound as a main chain, since the main chain of the resin is too rigid, the etching resistance is a practical level, but the reactivity of the acid-decomposable protecting group is significantly worse than that of the acrylic system, so It is also undesirable because the substrate adhesion is low because it is low resolution and the main chain of the resin is too rigid. While further refinement is required by pattern rules, there is a need for a resist material that exhibits excellent performance in all of sensitivity, resolution, and etching resistance.
[5] This invention is made | formed in view of the said situation, Comprising: (1) a polymer compound excellent in reactivity, rigidity, and board | substrate adhesiveness, (2) this polymer compound is contained as a base resin, and the resolution and etching resistance which are far exceeding a conventional product are excellent. It is an object to provide a resist material having and (3) a pattern forming method using the resist material.
[6] MEANS TO SOLVE THE PROBLEM As a result of earnestly examining in order to achieve the said objective, the novel high molecular weight compound of 1,000-500,000 of the weight average molecular weight containing the repeating unit represented by following formula (1-1) or 1-2 obtained by the method mentioned later is It has been found that the resist material using this compound as the base resin has high resolution and high etching resistance, and is excellent in high reactivity, rigidity and substrate adhesion, and this resist material is very effective for precise fine processing.
[7] That is, the present invention provides the following polymer compound.
[8] [I] A polymer compound having a weight average molecular weight of 1,000 to 500,000, comprising a repeating unit represented by the following Chemical Formula 1-1 or 1-2.
[9] <Formula 1-1>
[10]
[11] <Formula 1-2>
[12]
[13] (In formula, R <^1> represents a hydrogen atom or a C1-C6 linear, branched or cyclic alkyl group, R <^2> represents a hydrogen atom or the C1-C15 acyl group or the alkoxycarbonyl group, and is a constituent carbon atom. Some or all of the hydrogen atoms may be substituted with halogen atoms, Y represents a divalent group having 1 to 15 carbon atoms, and together with the atomic group to which it is bonded form a cyclic structure, k is 0 or 1, m is an integer of 0 to 5 to be)
[14] [II] The polymer compound according to [I], further comprising a repeating unit represented by the following Formula 2-1 in addition to the repeating unit represented by the above Formula 1-1.
[15] <Formula 2-1>
[16]
[17] (Wherein k is the same as above and R is³Silver hydrogen atom, methyl group or CH₂CO₂R⁵To R⁴Is a hydrogen atom, methyl group or CO₂R⁵Represents R⁵Represents a linear, branched or cyclic alkyl group having 1 to 15 carbon atoms, R⁶Represents an acid labile, R⁷A silver halogen atom, a hydroxyl group, a straight, branched or cyclic alkoxy group having 1 to 15 carbon atoms, an acyloxy group, an alkoxycarbonyloxy group or an alkylsulfonyloxy group, or a straight, branched or cyclic ring having 2 to 15 carbon atoms Represents an alkoxyalkoxy group, and some or all of the hydrogen atoms on the constituent carbon atoms may be substituted with halogen atoms, and Z represents a single bond or a linear, branched or cyclic (n + 2) valent hydrocarbon group having 1 to 5 carbon atoms. In the case of a hydrocarbon group, one or more methylenes may be substituted with oxygen to form a chain or cyclic ether, or two hydrogens of the same carbon may be substituted with oxygen to form a ketone, and n is 0, 1 or 2).
[18] [III] The polymer compound according to [I], further comprising a repeating unit represented by the following formulas 2-1 and 3 in addition to the repeating unit represented by the formula (1-1).
[19] <Formula 2-1>
[20]
[21] <Formula 3>
[22]
[23] (Wherein k, n, Z, R ³ to R ⁷ are the same as above)
[24] [IV] In [I], in addition to the repeating unit represented by the said Formula (1-1), it contains the repeating unit represented by following formula (4), or these repeating units of formula (1-1) and (4), and the following formula (2) A polymeric compound comprising a repeating unit represented by -1 and a repeating unit represented by the following formula (3).
[25] <Formula 2-1>
[26]
[27] <Formula 3>
[28]
[29] <Formula 4>
[30]
[31] (Wherein k, n, Z, R ³ to R ⁷ are the same as above)
[32] [V] The polymer compound according to [I], further comprising a repeating unit represented by the following Formula 2-2 in addition to the repeating unit represented by the above Formula 1-2.
[33] <Formula 2-2>
[34]
[35] (Wherein k, n, Z, R ³ to R ⁷ are the same as above)
[36] In addition, the present invention provides the following resist material.
[37] [VI] A resist material comprising the polymer compound according to any one of [I] to [V].
[38] Moreover, this invention provides the following pattern formation method.
[39] [Iii] A step of applying the resist material according to [VI] on a substrate, a step of exposing with a high energy ray or an electron beam through a photomask after the heat treatment, and heat treatment as necessary, followed by development using a developer. Pattern forming method comprising the step of.
[40] The polymer compound containing the repeating unit represented by the formula (1-1) or (1-2) has high rigidity because the main chain contains an alicyclic ring having a crosslink. Moreover, since it has a lactone structure in addition to a hydroxyl group, an acyloxy group, or an alkoxycarbonyloxy group, it is high in polarity and excellent also in board | substrate adhesiveness. In addition, due to the spacer having an appropriate length introduced between the rigid main chain and the lactone structure, the rigidity that has been excessively conventionally moderated is moderately relaxed, and the lactone structure is separated from the main chain so that the lactone structure can function more effectively as a polar group. As a result, the substrate adhesion is significantly higher than the conventional products. In addition, the reduction in reactivity, which has been a major problem in the past, has been improved by the effect of spacer introduction, thereby improving the diffusivity of the generated acid, and at the same time, reducing the line-edge roughness. Therefore, the resist material using this polymer compound as a base resin has excellent performance in all of sensitivity, resolution, and etching resistance, and is very useful for forming a fine pattern.
[41] Hereinafter, the present invention will be described in more detail.
[42] The novel high molecular compound of the present invention has a weight average molecular weight of 1,000 to 500,000, characterized in that it contains a repeating unit represented by the following formula 1-1 or 1-2.
[43] <Formula 1-1>
[44]
[45] <Formula 1-2>
[46]
[47] In formula, R <^1> represents a hydrogen atom or a C1-C6 linear, branched or cyclic alkyl group, and specifically, as an alkyl group, methyl, ethyl, n-propyl, isopropyl, n-butyl, isobutyl, sec -Butyl, tert-butyl, tert-amyl, n-pentyl, n-hexyl, cyclopentyl, cyclohexyl and the like can be exemplified, R ² represents a hydrogen atom or an acyl or alkoxycarbonyl group having 1 to 15 carbon atoms, Some or all of the hydrogen atoms on the constituent carbon atoms may be substituted with halogen atoms. Specifically, formyl, acetyl, propionyl, pivaloyl, methoxycarbonyl, ethoxycarbonyl, tert-butoxycarbonyl, trifluoroacetyl, trichloroacetyl, 3,3,3-trifluoro Propionyl and the like can be exemplified, and Y represents a divalent organic group having 1 to 15 carbon atoms and forms a cyclic structure together with the atomic group to which it is bonded. Specifically, the following partial structure As lactone structure Or the structure which the condensation of the heterocyclic ring containing hydrocarbon rings or hetero atoms, such as cycloalkane, cycloalkene, and aromatic hydrocarbon, can be illustrated.
[48] k is 0 or 1, m is 0-5, More preferably, it is an integer of 0-3.
[49] In addition, it is preferable to make the high molecular compound of this invention into the following four types more specifically.
[50] (1) In addition to the repeating unit represented by the said Formula (1-1), it contains the repeating unit represented by following formula (2-1).
[51] <Formula 2-1>
[52]
[53] (Wherein k is the same as above and R is³Silver hydrogen atom, methyl group or CH₂CO₂R⁵To R⁴Is a hydrogen atom, methyl group or CO₂R⁵Represents R⁵Represents a linear, branched or cyclic alkyl group having 1 to 15 carbon atoms, R⁶Represents an acid labile, R⁷A silver halogen atom, a hydroxyl group, a straight, branched or cyclic alkoxy group having 1 to 15 carbon atoms, an acyloxy group, an alkoxycarbonyloxy group or an alkylsulfonyloxy group, or a straight, branched or cyclic ring having 2 to 15 carbon atoms Represents an alkoxyalkoxy group, and some or all of the hydrogen atoms on the constituent carbon atoms may be substituted with halogen atoms, and Z represents a single bond or a linear, branched or cyclic (n + 2) valent hydrocarbon group having 1 to 5 carbon atoms. In the case of a hydrocarbon group, one or more methylenes may be substituted with oxygen to form a chain or cyclic ether, or two hydrogens of the same carbon may be substituted with oxygen to form a ketone, and n is 0, 1 or 2).
[54] (2) In addition to the repeating unit represented by the said Formula (1-1), it contains the repeating unit represented by following formula (2-1) and (3).
[55] <Formula 2-1>
[56]
[57] <Formula 3>
[58]
[59] (Wherein k, n, Z, R ³ to R ⁷ are the same as above)
[60] (3) a repeating unit represented by the following formula (4) in addition to the repeating unit represented by the above formula (1-1), or a repeating unit of these formulas (1-1) and (4), represented by the following formula (2-1) A unit and a repeating unit represented by following formula (3).
[61] <Formula 2-1>
[62]
[63] <Formula 3>
[64]
[65] <Formula 4>
[66]
[67] (Wherein k, n, Z, R ³ to R ⁷ are the same as above)
[68] (4) In addition to the repeating unit represented by the said Chemical formula 1-2, containing the repeating unit represented by following Chemical formula 2-2.
[69] <Formula 2-2>
[70]
[71] (Wherein k, n, Z, R ³ to R ⁷ are the same as above)
[72] Where R³Silver hydrogen atom, methyl group or CH₂CO₂R⁵To R⁴Is a hydrogen atom, methyl group or CO₂R⁵Represents R⁵Represents a linear, branched or cyclic alkyl group having 1 to 15 carbon atoms, specifically, methyl group, ethyl group, propyl group, isopropyl group, n-butyl group, sec-butyl group, tert-butyl group, tert-a Push, n-pentyl group, n-hexyl group, cyclopentyl group, cyclohexyl group, ethylcyclopentyl group, butylcyclopentyl group, ethylcyclohexyl group, butylcyclohexyl group, adamantyl group, ethyl adamantyl group, butyl Adamantyl group etc. can be illustrated, R is⁶Represents an acid labile group, and specific examples thereof will be described later. R⁷A silver halogen atom, a hydroxyl group, a straight, branched or cyclic alkoxy group having 1 to 15 carbon atoms, an acyloxy group, an alkoxycarbonyloxy group or an alkylsulfonyloxy group, or a straight, branched or cyclic group having 2 to 15 carbon atoms An alkoxyalkoxy group, and some or all of the hydrogen atoms on the constituent carbon atoms may be substituted with halogen atoms, specifically, fluorine, chlorine, bromine, methoxy group, ethoxy group, propoxy group, isopropoxy group, n-butoxide Period, sec-butoxy group, tert-butoxy group, tert-amyloxy group, n-pentoxy group, n-hexyloxy group, cyclopentyloxy group, cyclohexyloxy group, ethylcyclopentyloxy group, butylcyclopentyloxy group , Ethylcyclohexyloxy group, butylcyclohexyloxy group, adamantyloxy group, ethyl adamantyloxy group, butyl adamantyloxy group, formyloxy group, acetoxy group, ethylcarbonyloxy group, pivaloyloxy group, methoxy Shika Carbonyloxy group, ethoxycarbonyloxy group, tert-butoxycarbonyloxy group, methanesulfonyloxy group, ethanesulfonyloxy group, n-butanesulfonyloxy group, trifluoroacetoxy group, trichloroacetoxy group, 2,2,2-trifluoroethylcarbonyloxy group, methoxymethoxy group, 1-ethoxyethoxy group, 1-ethoxypropoxy group, 1-tert-butoxyethoxy group, 1-cyclohexyl Oxyethoxy group, 2-tetrahydropranyloxy group, 2-tetrahydropyranyloxy group, etc. can be illustrated, Z is a single bond or a linear, branched or cyclic n + divalent hydrocarbon of 1 to 5 carbon atoms. Group, and in the case of a hydrocarbon group, at least one methylene may be substituted with oxygen to form a chain or cyclic ether, or two hydrogens on the same carbon may be substituted with oxygen to form a ketone, for example, n = O. In the case of specifically methylene, ethylene, trimethylene, te Lamethylene, pentamethylene, hexamethylene, 1,2-propanediyl, 1,3-butanediyl, 1-oxo-2-oxapropane-1,3-diyl, 3-methyl-1-oxo-2-oxabutane -1,4-diyl etc. can be illustrated, and when it is other than n = O, n + divalent group etc. except one hydrogen atom can be illustrated from the said specific example.
[73] Various kinds can be used as the acid labile group of R ⁶ , but specifically, a group represented by the following formulas L1 to L4, a C4-20, preferably a 4-15 tertiary alkyl group, and each alkyl group is a trialkyl having 1 to 6 carbon atoms. A silyl group, a C4-C20 oxoalkyl group, etc. are mentioned.
[74]
[75] Here, the dashed line indicates the number of bonds (hereinafter, the same). In the formula, R ^L01 and R ^L02 represent a hydrogen atom or a linear, branched or cyclic alkyl group having 1 to 18 carbon atoms, preferably 1 to 10 carbon atoms, specifically, methyl group, ethyl group, propyl group, isopropyl group, n-butyl group, sec-butyl group, tert-butyl group, cyclopentyl group, cyclohexyl group, 2-ethylhexyl group, n-octyl group, etc. can be illustrated, R <^L03> is C1-C18, Preferably it is Represents a monovalent hydrocarbon group which may have a hetero atom such as an oxygen atom of 1 to 10, and a linear, branched or cyclic alkyl group, and some of these hydrogen atoms are hydroxyl, alkoxy, oxo, amino, alkylamino, etc. The substituted thing is mentioned as an example, Specifically, the following substituted alkyl group can be illustrated.
[76]
[77] R ^L01 and R ^L02 , R ^L01 and R ^L03 , R ^L02 and R ^L03 may form a ring, and when forming a ring, R ^L01 , R ^L02 and R ^L03 each have 1 to 18 carbon atoms, preferably 1 to 18 carbon atoms. 10 linear or branched alkylene groups are shown.
[78] R ^L04 represents a C4-C20, preferably a C3- ^C15 tertiary alkyl group, each alkyl group each having a trialkylsilyl group having 1 to 6 carbon atoms, an oxoalkyl group having 4 to 20 carbon atoms, or a group represented by the above formula L1, Specific examples of tertiary alkyl groups include tert-butyl group, tert-amyl group, 1,1-diethylpropyl group, 2-cyclopentylpropan-2-yl group, 2-cyclohexylpropan-2-yl group, and 2- (non Cyclo [2.2.1] heptan-2-yl) propan-2-yl group, 2- (adamantan-1-yl) propan-2-yl group, 1-ethylcyclopentyl group, 1-butylcyclopentyl group, 1 -Ethylcyclohexyl group, 1-butylcyclohexyl group, 1-ethyl-2-cyclopentenyl group, 1-ethyl-2-cyclohexenyl group, 2-methyl-2-adamantyl group, 2-ethyl-2- Adamantyl group etc. can be illustrated, A trimethylsilyl group, a triethyl silyl group, a dimethyl- tert- butyl silyl group etc. are mentioned specifically as a trialkyl silyl group, A 3-oxocyclohexyl specifically, is mentioned as an oxoalkyl group. There may be mentioned 4-methyl-2-oxo-dioxane-4-yl group, 5-methyl-2-oxo-5-oxide solran weather. x is an integer of 0-6.
[79] R ^L05 represents a monovalent hydrocarbon group which may contain a hetero atom having 1 to 8 carbon atoms or a substituted aryl group having 6 to 20 carbon atoms, and specifically, a methyl group as a monovalent hydrocarbon group which may contain a hetero atom; Straight chain such as ethyl group, propyl group, isopropyl group, n-butyl group, sec-butyl group, tert-butyl group, tert-amyl group, n-pentyl group, n-hexyl group, cyclopentyl group, cyclohexyl group Branched or cyclic alkyl groups, some of these hydrogen atoms substituted with hydroxyl groups, alkoxy groups, carboxyl groups, alkoxycarbonyl groups, oxo groups, amino groups, alkylamino groups, cyano groups, mercapto groups, alkylthio groups, sulfo groups, etc. As an aryl group which may be substituted, specifically, a phenyl group, methylphenyl group, naphthyl group, anthryl group, phenanthryl group, pyrenyl group, etc. can be illustrated, y is 0 or 1, z is 0 , 1, 2, or 3 , 2y + z = 2 or 3.
[80] R ^L06 represents a monovalent hydrocarbon group which may contain a hetero atom having 1 to 8 carbon atoms or an aryl group which may be substituted with 6 to 20 carbon atoms, and specifically, the same as those for R ^L05 can be exemplified. R ^L07 to R ^L16 each independently represent a hydrogen atom or a monovalent hydrocarbon group which may include a hetero atom having 1 to 15 carbon atoms, and specifically, methyl group, ethyl group, propyl group, isopropyl group, n-butyl group, sec -Butyl group, tert-butyl group, tert-amyl group, n-pentyl group, n-hexyl group, n-octyl group, n-nonyl group, n-decyl group, cyclopentyl group, cyclohexyl group, cyclopentylmethyl group Linear, branched and cyclic alkyl groups such as cyclopentylethyl group, cyclopentylbutyl group, cyclohexylmethyl group, cyclohexylethyl group and cyclohexylbutyl group, and some of these hydrogen atoms are hydroxyl group, alkoxy group, carboxyl group, alkoxycarbonyl group, The thing substituted by an oxo group, an amino group, an alkylamino group, a cyano group, a mercapto group, an alkylthio group, a sulfo group, etc. can be illustrated. R ^L07 to R ^L16 may form a ring with each other (for example, R ^L07 and R ^L08 , R ^L07 and R ^L09 , R ^L08 and R ^L10 , R ^L09 and R ^L10 , R ^L11 and R ^L12 , R ^L13 And R ^L14 ), in which case a divalent hydrocarbon group which may contain a hetero atom having 1 to 15 carbon atoms, specifically, exemplified by excluding one hydrogen atom from those exemplified in the monovalent hydrocarbon group. . In addition, R ^L07 to R ^L16 may be bonded to adjacent carbon directly to form a double bond (for example, R ^L07 and R ^L09 , R ^L09 and R ^L15 , R ^L13 and R ^L15 and the like).
[81] Among the acid labile groups represented by the above formula (L1), the following groups may be specifically exemplified as being linear or branched.
[82]
[83] Among the acid labile groups represented by the above formula (L1), cyclic ones are specifically tetrahydrofuran-2-yl group, 2-methyltetrahydrofuran-2-yl group, tetrahydropyran-2-yl group, and 2-methyltetrahydropyran-2. -Diary etc. can be illustrated.
[84] Specific examples of the acid labile group of Formula L2 include tert-butoxycarbonyl group, tert-butoxycarbonylmethyl group, tert-amyloxycarbonyl group, tert-amyloxycarbonylmethyl group, 1,1-diethylpropyloxycarbonyl group, 1,1 -Diethylpropyloxycarbonylmethyl group, 1-ethylcyclopentyloxycarbonyl group, 1-ethylcyclopentyloxycarbonylmethyl group, 1-ethyl-2-cyclopentenyloxycarbonyl group, 1-ethyl-2-cyclopentenyloxycarbon A carbonylmethyl group, 1-ethoxyethoxycarbonylmethyl group, 2-tetrahydropyranyloxycarbonylmethyl group, 2-tetrahydrofuranyloxycarbonylmethyl group, etc. can be illustrated.
[85] Specific examples of the acid labile group of Chemical Formula L3 include 1-methylcyclopentyl, 1-ethylcyclopentyl, 1-n-propylcyclopentyl, 1-isopropylcyclopentyl, 1-n-butylcyclopentyl, and 1-sec-butylcyclo Pentyl, 1-methylcyclohexyl, 1-ethylcyclohexyl, 3-methyl-1-cyclopenten-3-yl, 3-ethyl-1-cyclopenten-3-yl, 3-methyl-1-cyclohexene-3 -Yl, 3-ethyl-1-cyclohexen-3-yl and the like can be exemplified.
[86] Specific examples of the acid labile group of Formula L4 include the following groups.
[87]
[88] Moreover, the C4-20 tertiary alkyl group, each alkyl group can specifically illustrate the same thing as what was specifically mentioned by ^RL04 as a C1-C6 trialkylsilyl group, a C4-C20 oxoalkyl group, respectively.
[89] In addition, although the specific example of the repeating unit represented by the said General formula (1-1) is shown below, this invention is not limited to this. In the following chemical formula, Ac represents an acetyl group and t-Bu represents a tert-butyl group.
[90]
[91] Although the specific example of the repeating unit represented by the said General formula 1-2 is shown below, this invention is not limited to this.
[92]
[93] Although the specific example of the repeating unit represented by the said General formula (2-1) is shown below, this invention is not limited to this.
[94]
[95] Although the specific example of the repeating unit represented by the said General formula (2-2) is shown below, this invention is not limited to this.
[96]
[97] Although the specific example of the repeating unit represented by the said General formula (4) is shown below, this invention is not limited to this.
[98]
[99] The polymer compound of the present invention may further contain one kind or two or more kinds selected from repeating units represented by the following formulas M-1 to M8-2, if necessary.
[100]
[101] (Wherein⁰⁰¹Silver hydrogen atom, methyl group or CH₂CO₂R⁰⁰³To R⁰⁰²Is a hydrogen atom, methyl group or CO₂R⁰⁰³Represents R⁰⁰³Represents a linear, branched or cyclic alkyl group having 1 to 15 carbon atoms, R⁰⁰⁴Represents a monovalent hydrocarbon group containing a hydrogen atom, a carboxyl group having 1 to 15 carbon atoms or a hydroxyl group, and R⁰⁰⁵To R⁰⁰⁸At least one represents a monovalent hydrocarbon group containing a carboxyl group or a hydroxyl group having 1 to 15 carbon atoms, and the remaining ones each independently represent a hydrogen atom or a linear, branched or cyclic alkyl group having 1 to 15 carbon atoms, R⁰⁰⁵To R⁰⁰⁸May form a ring with each other, in which case R⁰⁰⁵To R⁰⁰⁸At least one represents a divalent hydrocarbon group containing a carboxyl group or a hydroxyl group having 1 to 15 carbon atoms, and the rest each independently represent a single bond or a linear, branched or cyclic alkylene group having 1 to 15 carbon atoms, R⁰⁰⁹Is -CO of 3 to 15 carbon atoms₂-Represents a monovalent hydrocarbon group containing a partial structure, R⁰¹⁰To R⁰¹³At least one of -C0 having 2 to 15 carbon atoms₂Monovalent hydrocarbon groups containing partial structures, the remainders each independently represent a hydrogen atom or a linear, branched or cyclic alkyl group having 1 to 15 carbon atoms, R⁰¹⁰To R⁰¹³May form a ring with each other, in which case R⁰¹⁰To R⁰¹³At least one of -CO is 1 to 15 carbon atoms₂-Represent a divalent hydrocarbon group containing a partial structure, the remainder each independently represent a single bond or a linear, branched or cyclic alkylene group having 1 to 15 carbon atoms, R⁰¹⁴Represents an alkyl group containing a polycyclic hydrocarbon group or a polycyclic hydrocarbon group having 7 to 15 carbon atoms, R⁰¹⁵Represents an acid labile, X represents CH₂Or an oxygen atom, k is 0 or 1)
[102] Where R⁰⁰¹Silver hydrogen atom, methyl group or CH₂CO₂R⁰⁰³of R⁰⁰²Is a hydrogen atom, methyl group or CO₂R⁰⁰³Represents R⁰⁰³Represents a linear, branched or cyclic alkyl group having 1 to 15 carbon atoms, specifically, methyl group, ethyl group, propyl group, isopropyl group, n-butyl group, sec-butyl group, tert-butyl group, tert-a Push, n-pentyl group, n-hexyl group, cyclopentyl group, cyclohexyl group, ethylcyclopentyl group, butylcyclopentyl group, ethylcyclohexyl group, butylcyclohexyl group, adamantyl group, ethyl adamantyl group, butyl Adamantyl group etc. can be illustrated, R is⁰⁰⁴Represents a monovalent hydrocarbon group containing a hydrogen atom, a carboxyl group having 1 to 15 carbon atoms or a hydroxyl group, and specifically, carboxyethyl, carboxybutyl, carboxycyclopentyl, carboxycyclohexyl, carboxynorbornyl, carboxyadamantyl, hydroxy Ethyl, hydroxybutyl, hydroxycyclopentyl, hydroxycyclohexyl, hydroxynorbornyl, hydroxyadamantyl, and the like;⁰⁰⁵To R⁰⁰⁸At least one represents a monovalent hydrocarbon group containing a carboxyl group or a hydroxyl group having 1 to 15 carbon atoms, and the rest independently represent a hydrogen atom or a linear, branched or cyclic alkyl group having 1 to 15 carbon atoms, and each having 1 to 15 carbon atoms. Specific examples of the monovalent hydrocarbon group containing a carboxyl group or a hydroxyl group include carboxy, carboxymethyl, carboxyethyl, carboxybutyl, hydroxymethyl, hydroxyethyl, hydroxybutyl, 2-carboxyoxycarbonyl, and 4-carboxyl groups. Methoxycarbonyl, 2-hydroxyethoxycarbonyl, 4-hydroxybutoxycarbonyl, carboxycyclopentyloxycarbonyl, carboxycyclohexyloxycarbonyl, carboxynorbornyloxycarbonyl, carboxyadamantyloxy Carbonyl, hydroxycyclopentyloxycarbonyl, hydroxycyclohexyloxycarbonyl, hydroxy norbornyloxy Carbonyl, hydroxyamadanthyloxycarbonyl, etc. can be illustrated. Specific examples of the linear, branched, cyclic alkyl group having 1 to 15 carbon atoms include R⁰⁰³The same can be illustrated as illustrated in the following. R⁰⁰⁵To R⁰⁰⁸May form a ring with each other, in which case R⁰⁰⁵To R⁰⁰⁸At least one of them represents a divalent hydrocarbon group containing a carboxyl group or a hydroxyl group having 1 to 15 carbon atoms, and the rest independently represent a single bond or a linear, branched or cyclic alkylene group having 1 to 15 carbon atoms. As a bivalent hydrocarbon group containing a C1-C15 carboxyl group or a hydroxyl group, the thing etc. which removed one hydrogen atom from what was illustrated by the said monovalent hydrocarbon group containing a carboxyl group or a hydroxyl group specifically, etc. can be illustrated. Specific examples of the linear, branched, cyclic alkylene group having 1 to 15 carbon atoms include R⁰⁰³The thing illustrated in the above can be illustrated by excluding one hydrogen atom.
[103] R ⁰⁰⁹ represents a monovalent hydrocarbon group containing a C3-C15 -CO ₂ -partial structure, specifically 2-oxooxolan-3-yl, 4,4-dimethyl-2-oxooxolane-3- One, 4-methyl-2-oxooxan-4-yl, 2-oxo-1,3-dioxolan-4-ylmethyl, 5-methyl-2-oxooxolan-5-yl and the like can be exemplified. . At least one of R ⁰¹⁰ to R ⁰¹³ represents a monovalent hydrocarbon group containing a -CO ₂ -substructure having 2 to 15 carbon atoms, and the others are each independently a hydrogen atom or a linear, branched or cyclic group having 1 to 15 carbon atoms An alkylene group is shown. 2 to 15 carbon atoms of -CO ₂ - as a monovalent hydrocarbon group containing a partial structure specifically 2-oxo-3-yloxy oxide solran Brassica Viterbo carbonyl, 4,4-dimethyl-2-oxo-3-yloxy oxide solran Cycarbonyl, 4-methyl-2-oxooxan-4-yloxycarbonyl, 2-oxo-1,3-dioxolan-4-ylmethyloxycarbonyl, 5-methyl-2-oxooxolane-5 -Yloxycarbonyl etc. can be illustrated. As a C1-C15 linear, branched, cyclic alkylene group, the thing similar to what was illustrated by R <^003> can be illustrated specifically.
[104] R ⁰¹⁰ to R ⁰¹³ may form a ring with each other, in which case at least one of R ⁰¹⁰ to R ⁰¹³ represents a divalent hydrocarbon group containing a -CO ₂ -substructure having 1 to 15 carbon atoms, and the others are each independently A single bond or a linear, branched or cyclic alkylene group having 1 to 15 carbon atoms is shown. As a divalent hydrocarbon group containing a -CO ₂ -partial structure having 1 to 15 carbon atoms, specifically, 1-oxo-2-oxapropane-1,3-diyl, 1,3-dioxo-2-oxapropane-1 1 containing the -CO ₂ -partial structure in addition to, 3-diyl, 1-oxo-2-oxabutane-1,4-diyl, 1,3-dioxo-2-oxabutane-1,4-diyl and the like The thing except one hydrogen atom etc. can be illustrated from what was illustrated by the hydrocarbon group. Examples of the linear, branched or cyclic alkylene group having 1 to 15 carbon atoms include those excluding one hydrogen atom from those specifically exemplified in R ⁰⁰³ .
[105] R ⁰¹⁴ represents a polycyclic hydrocarbon group having 7 to 15 carbon atoms or an alkyl group containing a polycyclic hydrocarbon group, and specifically, norbornyl, bicyclo [3.3.1] nonyl, tricyclo [5.2.1.0 ^2,6 ] decyl , Adamantyl, ethyl adamantyl, butyl adamantyl, norbornylmethyl, adamantylmethyl and the like. R ⁰¹⁵ represents an acid labile group, and specifically, may exemplify the same as those exemplified in the foregoing description. X represents CH ₂ or an oxygen atom. k is 0 or 1;
[106] The repeating units represented by the formulas M-1 to M8-2 impart various characteristics such as developer affinity, substrate adhesion, and etching resistance when used as a resist material, and by adjusting the content of such repeating units appropriately, Fine tune the performance of the material.
[107] In addition, the weight average molecular weight of the high molecular compound of this invention is 1,000-500,000, Preferably it is 3,000-100,000. If it is out of this range, etching resistance may fall extremely, or it may become impossible to ensure the difference of the dissolution rate before and after exposure, and resolution may fall.
[108] The polymer compound of the present invention is a compound represented by the following formula (1a) as a first monomer, 1 to 3 types selected from the compounds represented by the following formulas (2a to 4a) as a monomer of 2 to 4, more optionally, It can be produced by copolymerization reaction using one or two or more selected from the compounds represented by the formulas M1a to M8a as monomers thereafter.
[109]
[110] (Wherein k, n, m, Y, Z, R ¹ to R ⁷ are the same as above)
[111]
[112] ( ^Wherein k, R ⁰⁰¹ to R ⁰¹⁵ , X are the same as above)
[113] The compound of the general formula la and its production method are described in Japanese Patent Application No. 2000-164553. That is, the lactone compound of formula la may be prepared, for example, by the following method, but is not limited thereto.
[114] First, a base is reacted with a lactone compound (i) in a solvent under an inert gas atmosphere such as nitrogen and argon to prepare a metal enolate (ii), and the enolate solution is reacted with a carbonyl compound (iii) to react with hydroxy. The lactone compound la-1 is obtained.
[115] In this case, the base amount is preferably 0.8 to 2.0 moles, particularly 1.0 to 1.5 moles, per mole of the lactone compound (i), and the amount of the carbonyl compound (iii) is 0.8 to 1 mole per one mole of the lactone compound (i). It is preferable to set it as 2.0 mol, especially 0.9-1.5 mol.
[116]
[117] (Wherein k, m, R ¹ , R ² and Y are the same as above, M represents Li, Na, K, Mg, X 'or ZnX', X is a hydrogen atom or a halogen atom, X 'is Represents a halogen atom)
[118] As a base which can be used specifically, when X is a hydrogen atom, sodium amide, potassium amide, lithium diisopropylamide, potassium diisopropylamide, lithium dicyclohexylamide, potassium dicyclohexylamide, lithium 2,2,6 Metal amides such as 6-tetramethylpiperidine, lithium bistrimethylsilylamide, sodium bistrimethylsilylamide, potassium bistrimethylsilylamide, lithium isopropylcyclohexylamide, bromo magnesium diisopropylamide, sodium methoxide , Alkoxides such as sodium ethoxide, lithium methoxide, lithium ethoxide, lithium tert-butoxide, potassium tert-butoxide, sodium hydroxide, lithium hydroxide, potassium hydroxide, barium hydroxide, tetra-n-butylammonium Inorganic hydroxides such as sodium carbonate, sodium carbonate, sodium bicarbonate, lithium carbonate and potassium carbonate, sodium hydride, lithium hydride, potassium hydride, X is halogen in alkyl hydrides such as calcium hydride, tritium lithium, trityl sodium, trityl potassium, methyl lithium, phenyl lithium, sec-butyl lithium, tert- butyl lithium, ethyl magnesium bromide In the case of an atom, although metals, such as zinc and magnesium, can be illustrated, it is not limited to this. Ethers such as tetrahydrofuran, diethyl ether, di-n-butyl ether, 1,4-dioxane, hydrocarbons such as n-hexane, n-heptane, benzene, toluene, xylene, cumene, methanol, Alcohols such as ethanol, isopropyl alcohol, tert-butyl alcohol, amines such as liquid ammonia and methylamine, aprotic polar solvents such as dimethyl sulfoxide and N, N-dimethylformamide are selected according to the reaction conditions. It can be used alone or in combination. In addition, N, N, N ', N'-tetramethylethylenediamine (TMEDA), hexamethyl phosphate triamide (HMPA), N, N'-dimethylpropylene urea (DMPU), 1,3-dimethyl-2-imide It is also possible to use a compound having a ligand such as dazolidinone (DMI) as an auxiliary. The reaction temperature and time vary depending on the starting materials used. For example, metal enolates generated when a strong base such as a lactone compound and lithium bistrimethylsilylamide in which X is a hydrogen atom in formula (i) is used as the starting material. Because of this thermal instability, it is preferable to maintain the reaction temperature in the case of reacting the carbonyl compound (iii) at a temperature of -80 to -20 ° C and to make the reaction time about 0.5 to 3 hours. On the other hand, in the case of using a metal such as α-halolactone compound and zinc in which X is a halogen atom in formula (i), it is preferable to maintain the reaction time at 0 to 80 ° C. to make the reaction time about 1 to 20 hours. But it is not limited thereto. From the reaction mixture containing the nucleophilic adduct, hydroxy compound la-1 of the desired product is obtained by conventional aqueous work-up. If necessary, the desired product la-1 is purified according to conventional methods such as distillation, chromatography, recrystallization, and the like.
[119] The corresponding acyl or alkoxycarbonylated product la-2 is obtained by esterifying the hydroxy compound la-1 obtained here.
[120] <Formula 31>
[121]
[122] R ³ W (W represents a leaving group such as a hydroxyl group, a halogen atom, an acyloxy group, an alkoxycarbonyloxy group, p-nitrophenyloxy group, etc.) as an esterifying agent to 1 mole of the hydroxy compound la-1 It can carry out by a conventional method, using-5 mol, Preferably it is 1-2 mol. As the esterifying agent R ³ W, for example, carboxylic acids such as formic acid (when W = OH), acid halogen compounds such as acetyl chloride, acetyl bromide and propionyl chloride (when W = halogen atom), acetic anhydride Acid anhydrides such as trifluoroacetic anhydride, acetic anhydride mixed acid and di-t-butyl bicarbonate (when acyloxy group or alkoxycarbonyloxy group), p-nitrophenyl acetate, p-nitrophenyl propionate Activated esters, such as these (when leaving group, such as W = p-nitrophenyloxy group), are mentioned. The reaction is solventless or chlorine-based solvents such as methylene chloride, chloroform and triclen, ethers such as tetrahydrofuran, diethyl ether, di-n-butyl ether and 1,4-dioxane, n-hexane and n- It performs in the single or mixed solvent chosen from hydrocarbons, such as heptane, benzene, toluene, xylene, cumene. It is preferable to use 1 to 30 moles, preferably 1 to 5 moles of base per 1 mole of hydroxy compound la-1, except when the esterification agent is a carboxylic acid (when W = OH). Examples of the base include triethylamine, pyridine, dimethylaniline, 4-dimethylaminopyridine and the like. These bases can be used alone or in combination. The esterifying agent and the base are added in sequence or simultaneously and proceed with the reaction such as cooling or heating as necessary. After the reaction proceeds, the ester compound la-2 of the desired product is obtained from the reaction mixture containing the esterified product by ordinary aqueous work-up. If necessary, the desired product la-2 is purified according to conventional methods such as distillation, chromatography, recrystallization, and the like.
[123] In a copolymerization reaction, by adjusting the presence ratio of each monomer suitably, it can be set as the high molecular compound which can exhibit the preferable performance, when used as a resist material.
[124] In this case, the polymer compound of the present invention,
[125] (i) monomers of formula la,
[126] (ii) monomers of formulas 2a to 4a,
[127] (iii) monomers of Formulas M1a to M8a, and further
[128] (iv) monomers containing carbon-carbon double bonds other than the above (i) to (iii),
[129] For example, substituted acrylic acid esters, such as methyl methacrylate, methyl crotonate, dimethyl maleate, and dimethyl itaconic acid, unsaturated carboxylic acids, such as maleic acid, a fumaric acid, and itaconic acid, norbornene, norbornene-5- Substituted norbornenes such as methyl carboxylate, unsaturated acid anhydrides such as itaconic anhydride, and other monomers can be copolymerized.
[130] Although the preferable content rate of each repeating unit based on each monomer in the high molecular compound of this invention can be made into the range shown below, for example, it is not limited to this. In addition, all% here is mol%.
[131] (I) when the high molecular compound contains a repeating unit represented by the above formula (1-1) and a repeating unit represented by 2-1,
[132] ① 1 to 90%, preferably 5 to 80%, more preferably 10 to 70%, of the repeating unit represented by Formula 1-1 based on the monomer of Formula 1a,
[133] ② 1 to 90%, preferably 5 to 80%, more preferably 10 to 70%, of the repeating unit represented by the formula (2-1) based on the monomer of the formula (2a), and
[134] ③ 0 to 50%, preferably 0 to 40%, more preferably 0 to 30%, of the repeating units represented by the formulas M5-1 to M8-1 based on the monomers of the formulas M5a to M8a,
[135] (4) The repeating unit based on other monomers may contain 0 to 50%, preferably 0 to 40%, and more preferably 0 to 30%, respectively.
[136] (II) When the high molecular compound contains a repeating unit represented by the formula (1-1), a repeating unit represented by 2-1, and a repeating unit represented by 3,
[137] ① 1 to 49%, preferably 3 to 45%, more preferably 5 to 40%, of the repeating unit represented by the formula (1-1) based on the monomer of the formula (1a),
[138] ② 1 to 49%, preferably 3 to 45%, more preferably 5 to 40%, of the repeating unit represented by the formula (2-1) based on the monomer of the formula (2a),
[139] ③ 50 mol% of the repeating unit represented by the formula (3) based on the monomer of the formula (3a),
[140] ④ 0 to 25%, preferably 0 to 20%, more preferably 0 to 15%, of the repeating units represented by the formulas M5-1 to M8-1 based on the monomers of the formulas M5a to M8a, and
[141] (5) A repeating unit based on other monomers may contain 0 to 25%, preferably 0 to 20%, and more preferably 0 to 15%, respectively.
[142] (III) When the polymer compound contains a repeating unit represented by the formula (1-1), a repeating unit represented by 2-1, and / or a repeating unit represented by 4 and a repeating unit represented by 3,
[143] ① 1 to 49%, preferably 3 to 45%, more preferably 5 to 40%, of the repeating unit represented by the formula (1-1) based on the monomer of the formula (1a),
[144] ② 0 to 40%, preferably 0 to 35%, more preferably 0 to 30%, of the repeating unit represented by the formula (2-1) based on the monomer of the formula (2a),
[145] ③ 1 to 80%, preferably 1 to 70%, more preferably 1 to 50%, of the repeating unit represented by the formula (4) based on the monomer of the formula (4a),
[146] ④ 1 to 49%, preferably 5 to 45%, more preferably 10 to 40%, of the repeating unit represented by the formula (3) based on the monomer of the formula (3a),
[147] ⑤ 0 to 25%, preferably 0 to 20%, more preferably 0 to 15%, of the repeating units represented by the formulas Ml to M8-1 based on the monomers of the formulas M1a to M8a, and
[148] (6) 0 to 25%, preferably 0 to 20%, and more preferably 0 to 15%, respectively, of the repeating units based on other monomers.
[149] (IV) When the high molecular compound contains the repeating unit represented by the above formula 1-2 and the repeating unit represented by 2-2,
[150] ① 1 to 90%, preferably 5 to 80%, more preferably 10 to 70%, of the repeating unit represented by the formula 1-2 based on the monomer of the formula 1a,
[151] ② 1 to 90%, preferably 5 to 80%, more preferably 10 to 70%, of the repeating unit represented by the formula (2-2) based on the monomer of the formula (2a),
[152] ③ 0 to 50%, preferably 0 to 40%, more preferably 0 to 30%, of the repeating units represented by the formulas M5-2 to M8-2 based on the monomers of the formulas M5a to M8a, and
[153] (4) The repeating unit based on other monomers may contain 0 to 50%, preferably 0 to 40%, and more preferably 0 to 30%, respectively.
[154] Although the copolymerization reaction which manufactures the high molecular compound of this invention can be illustrated variously, Preferably, radical polymerization, anionic polymerization, or coordination polymerization etc. are mentioned.
[155] The reaction conditions of the radical polymerization reaction include (a) hydrocarbons such as benzene, ethers such as tetrahydrofuran, alcohols such as ethanol, and ketones such as methyl isobutyl ketone, and (b) as a polymerization initiator. Azo compounds, such as 2,2'- azobisisobutyronitrile, or peroxides, such as benzoyl peroxide and lauroyl peroxide, are used, (c) Reaction temperature is maintained at 0-100 degreeC, (d) Reaction time Although it is preferable to make 0.5 to 48 hours, it does not exclude the case out of this range.
[156] The reaction conditions for the anionic polymerization reaction include (a) hydrocarbons such as benzene, ethers such as tetrahydrofuran, or liquid ammonia, and (b) metals such as sodium and potassium as the polymerization initiator, n-butyllithium , alkyl metals such as sec-butyllithium, ketyl, or Grignard reactants are used, (c) the reaction temperature is maintained at -78 ° C to 0 ° C, and (d) the reaction time is about 0.5 to 48 hours, (E) It is preferable to use proton-donating compounds such as methanol, halides such as methyl iodide, and other electromagnets as the terminator, but the case outside this range is not excluded.
[157] Reaction conditions for coordination polymerization include (a) using hydrocarbons such as n-heptane and toluene as solvents, and (b) a Ziegler-Natta catalyst consisting of transition metals such as titanium and alkylaluminum, chromium and nickel compounds as catalysts. Using an olefin-methacesis mixed catalyst represented by an oxide-supported Philips catalyst, a tungsten and rhenium mixed catalyst, and the like (c) The reaction temperature is maintained at 0 to 100 ° C, and the reaction time is 0.5 hours Although it is preferable to set it as about 48 hours, it does not exclude the case out of this range.
[158] The high molecular compound of this invention is effective as a base polymer of a resist material, and this invention provides the resist material containing this high molecular compound.
[159] The resist material of this invention can contain the compound which generate | occur | produces an acid in response to a high energy ray or an electron beam (henceforth an acid generator), an organic solvent, and other components as needed.
[160] As the acid generator used in the present invention,
[161] i. An onium salt of the formula P1a-1, P1a-2 or P1b,
[162] ii. A diazomethane derivative of the formula P2,
[163] iii. Glyoxime derivatives of the formula
[164] iv. A bissulphone derivative of the formula P4,
[165] v. Sulfonic acid esters of N-hydroxyimide compounds of formula P5,
[166] vi. β-ketosulfonic acid derivatives,
[167] vii. Disulfone derivatives,
[168] viii. Nitrobenzylsulfonate derivatives,
[169] ix. Sulfonic acid ester derivatives;
[170]
[171] ^Wherein R ^101a , R ^101b , and R ^101c each represent a linear, branched or cyclic alkyl group, an alkenyl group, an oxoalkyl group or an oxoalkenyl group having 1 to 12 carbon atoms, an aryl group having 6 to 20 carbon atoms, or 7 carbon atoms To an aralkyl group or an aryloxoalkyl group of 12 to 12, and some or all of the hydrogen atoms of these groups may be substituted by an alkoxy group or the like, and R ^101b and R ^101c may form a ring and form a ring. R ^101b , R ^101c each represent an alkylene group having 1 to 6 carbon atoms, and K ⁻ represents a non-nucleophilic counter ion.)
[172] R ^101a , R ^101b , and R ^101c may be the same as or different from each other, and specifically, as an alkyl group, methyl, ethyl, propyl, isopropyl, n-butyl, sec-butyl, tert-butyl, Pentyl, hexyl, heptyl, octyl, cyclopentyl, cyclohexyl, cycloheptyl, cyclopropylmethyl, 4-methylcyclohexyl, cyclohexylmethyl, norbornyl, adamantyl have. Examples of the alkenyl group include vinyl group, allyl group, propenyl group, butenyl group, hexenyl group, cyclohexenyl group and the like. Examples of the oxoalkyl group include a 2-oxocyclopentyl group, a 2-oxocyclohexyl group, and the like. A 2-oxopropyl group, a 2-cyclopentyl-2-oxoethyl group, a 2-cyclohexyl-2-oxoethyl group, 2 -(4-methylcyclohexyl) -2-oxoethyl group etc. are mentioned. As an aryl group, alkoxy, such as a phenyl group, a naphthyl group, and p-methoxyphenyl group, m-methoxyphenyl group, o-methoxyphenyl group, an ethoxyphenyl group, p-tert-butoxyphenyl group, m-tert-butoxyphenyl group, etc. Alkyl naph, such as alkylphenyl groups, such as a phenyl group, 2-methylphenyl group, 3-methylphenyl group, 4-methylphenyl group, ethylphenyl group, 4-tert- butylphenyl group, 4-butylphenyl group, and dimethylphenyl group, methylnaphthyl group, and ethyl naphthyl group, etc. Dialkoxy naphthyl groups, such as an alkoxy naphthyl group, such as a methyl group, a methoxy naphthyl group, and an ethoxy naphthyl group, a dimethyl naphthyl group, a diethyl naphthyl group, dialkoxy naphthyl groups, such as a dialkyl naphthyl group, a dimethoxy naphthyl group, and a diethoxy naphthyl group, etc. are mentioned. Can be. Examples of the aralkyl group include benzyl group, phenylethyl group and phenethyl group. As the aryl oxoalkyl group, 2-aryl-2-oxo such as 2-phenyl-2-oxoethyl group, 2- (1-naphthyl) -2-oxoethyl group, 2- (2-naphthyl) -2-oxoethyl group Ethyl group etc. are mentioned. Examples of non-nucleophilic counter ions of K ⁻ include halide ions such as chloride ions and bromide ions, triflate, fluoroalkyl sulfonates such as 1,1,1-trifluoroethanesulfonate and nonafluorobutanesulfonate, Alkyl sulfonates, such as an aryl sulfonate, such as a tosylate, benzene sulfonate, 4-fluorobenzene sulfonate, and 1,2,3,4,5-pentafluorobenzene sulfonate, a mesylate, butane sulfonate, are mentioned. Can be.
[173]
[174] (In formula, ^R102a , ^R102b represents a C1-C8 linear, branched or cyclic alkyl group, respectively, ^R103 represents a C1-C10 linear, branched or cyclic alkylene group, R is ^104a and R ^104b each represent a 2-oxoalkyl group having 3 to 7 carbon atoms, and K ⁻ represents a non-nucleophilic counter ion.)
[175] Specific examples of the R ^102a and R ^102b include methyl, ethyl, propyl, isopropyl, n-butyl, sec-butyl, tert-butyl, pentyl, hexyl, heptyl, octyl and cyclophene A methyl group, a cyclohexyl group, a cyclopropylmethyl group, 4-methylcyclohexyl group, a cyclohexylmethyl group, etc. are mentioned. ^Examples of R ¹⁰³ include methylene group, ethylene group, propylene group, butylene group, pentylene group, hexylene group, heptylene group, octylene group, nonylene group, 1,4-cyclohexylene group, 1,2-cyclohexylene group, 1,3-cyclopentylene group, a 1, 4- cyclooctylene group, a 1, 4- cyclohexane dimethylene group, etc. are mentioned. ^{Examples of} R ^104a and R ^104b include a 2-oxopropyl group, a 2-oxocyclopentyl group, a 2-oxocyclohexyl group, a 2-oxocycloheptyl group, and the like. K ^- may be the same as described in the formulas P1a-1 and P1a-2.
[176]
[177] (In formula, R <^105> , R <^106> represents a C1-C12 linear, branched or cyclic alkyl group or a halogenated alkyl group, a C6-C20 aryl group or a halogenated aryl group, or a C7-C12 aralkyl group. )
[178] ^Examples of the alkyl group of R ¹⁰⁵ and R ¹⁰⁶ include methyl group, ethyl group, propyl group, isopropyl group, n-butyl group, sec-butyl group, tert-butyl group, pentyl group, hexyl group, heptyl group, octyl group, amyl group, A cyclopentyl group, a cyclohexyl group, a cycloheptyl group, a norbornyl group, an adamantyl group etc. are mentioned. Examples of the halogenated alkyl group include trifluoromethyl group, 1,1,1-trifluoroethyl group, 1,1,1-trichloroethyl group, and nonafluorobutyl group. Examples of the aryl group include alkoxyphenyl groups such as phenyl group, p-methoxyphenyl group, m-methoxyphenyl group, o-methoxyphenyl group, ethoxyphenyl group, p-tert-butoxyphenyl group, and m-tert-butoxyphenyl group, and 2-methylphenyl. Alkylphenyl groups, such as group, 3-methylphenyl group, 4-methylphenyl group, ethylphenyl group, 4-tert- butylphenyl group, 4-butylphenyl group, and a dimethylphenyl group, are mentioned. Examples of the halogenated aryl group include fluorophenyl group, chlorophenyl group, 1,2,3,4,5-pentafluorophenyl group and the like. As an aralkyl group, a benzyl group, a phenethyl group, etc. are mentioned.
[179]
[180] (Wherein, R ¹⁰⁷ , R ¹⁰⁸ , R ¹⁰⁹ is a linear, branched or cyclic alkyl group or a halogenated alkyl group having 1 to 12 carbon atoms, an aryl group or halogenated aryl group having 6 to 20 carbon atoms, or an aral having 7 to 12 carbon atoms) Represents a kill group, and R ¹⁰⁸ and R ¹⁰⁹ may be bonded to each other to form a cyclic structure, and when forming a cyclic structure, R ¹⁰⁸ and R ¹⁰⁹ each represent a linear or branched alkylene group having 1 to 6 carbon atoms)
[181] Examples of the alkyl group, halogenated alkyl group, aryl group, halogenated aryl group, and aralkyl group for R ¹⁰⁷ , R ¹⁰⁸ and R ¹⁰⁹ include the same groups as described for R ¹⁰⁵ and R ¹⁰⁶ . Also, R ^108, an alkylene group of R ^109, may be mentioned methylene group, ethylene group, propylene group, butylene group, hexylene group and the like.
[182]
[183] (In formula, ^R101a and ^R101b are the same as the above.)
[184]
[185] (Wherein, R ¹¹⁰ represents an arylene group having 6 to 10 carbon atoms, an alkylene group having 1 to 6 carbon atoms or an alkenylene group having 2 to 6 carbon atoms, and some or all of the hydrogen atoms of these groups are also linear having 1 to 4 carbon atoms). It may be substituted with a chain or branched alkyl group or alkoxy group, nitro group, acetyl group, or phenyl group, R ¹¹¹ is a linear, branched or substituted alkyl group of 1 to 8 carbon atoms, alkenyl or alkoxyalkyl group, phenyl group, Or a naphthyl group, wherein some or all of the hydrogen atoms of these groups are also alkyl or alkoxy groups having 1 to 4 carbon atoms; phenyl groups which may be substituted with alkyl, alkoxy, nitro or acetyl groups having 1 to 4 carbon atoms; Hetero aromatic group of 5 to 5, or may be substituted with a chlorine atom, a fluorine atom)
[186] Here, as the arylene group of R ¹¹⁰ , 1,2-phenylene group, 1,8-naphthylene group, and the like, and as alkylene group, methylene group, 1,2-ethylene group, 1,3-propylene group, 1,4 -Butylene group, 1-phenyl-1, 2-ethylene group, norbornane-2,3-diyl group, and the like as alkenylene group, 1,2-vinylene group, 1-phenyl-1, 2-vinylene group, 5-norbornene-2,3-diyl group etc. are mentioned. ^Examples of the alkyl group of R ¹¹¹ are the same as those of R ^101a to R ^101c, and as the alkenyl group, a vinyl group, 1-propenyl group, allyl group, 1-butenyl group, 3-butenyl group, isopurenyl group, 1-pentenyl group, 3 -Pentenyl, 4-pentenyl, dimethylallyl, 1-hexenyl, 3-hexenyl, 5-hexenyl, 1-heptenyl, 3-heptenyl, 6-heptenyl, 7-octenyl Examples of the alkoxyalkyl group include methoxymethyl group, ethoxymethyl group, propoxymethyl group, butoxymethyl group, pentyloxymethyl group, hexyloxymethyl group, heptyloxymethyl group, methoxyethyl group, ethoxyethyl group, propoxyethyl group and butoxyethyl group. , Pentyloxyethyl group, hexyloxyethyl group, methoxypropyl group, ethoxypropyl group, propoxypropyl group, butoxypropyl group, methoxybutyl group, ethoxybutyl group, propoxybutyl group, methoxypentyl group, A methoxypentyl group, a methoxyhexyl group, a methoxyheptyl group, etc. are mentioned.
[187] As the alkyl group having 1 to 4 carbon atoms which may be substituted, methyl group, ethyl group, propyl group, isopropyl group, n-butyl group, isobutyl group, tert-butyl group and the like are used. A phenyl group which may be substituted with an alkyl group, an alkoxy group, a nitro group, or an acetyl group having 1 to 4 carbon atoms, such as a period, an ethoxy group, a propoxy group, an isopropoxy group, n-butoxy group, isobutoxy group, tert-butoxy group, etc. As a phenyl group, tolyl group, p-tert- butoxyphenyl group, p-acetylphenyl group, p-nitrophenyl group etc., a pyridyl group, a furyl group, etc. are mentioned as a C3-C5 hetero aromatic group.
[188] Specifically, for example, trifluoromethanesulfonic acid diphenyl iodonium, trifluoromethanesulfonic acid (p-tert-butoxyphenyl) phenyl iodonium, p-toluenesulfonic acid diphenyl iodonium, p-toluenesulfonic acid (p-tert-butoxyphenyl) phenyl iodonium, trifluoromethanesulfonic acid triphenylsulfonium, trifluoromethanesulfonic acid (p-tert-butoxyphenyl) diphenylsulfonium, trifluoromethanesulfonic acid bis ( p-tert-butoxyphenyl) phenylsulfonium, trifluoromethanesulfonic acid tris (p-tert-butoxyphenyl) sulfonium, p-toluenesulfonic acid triphenylsulfonium, p-toluenesulfonic acid (p-tert-butoxy Phenyl) diphenylsulfonium, p-toluenesulfonic acid bis (p-tert-butoxyphenyl) phenylsulfonium, p-toluenesulfonic acid tris (p-tert-butoxyphenyl) sulfonium, nonafluorobutanesulfonic acid triphenylsulf Phosphorium, butanesulfonic acid triphenylsulfonium, trifluoromethanesulfonic acid trimethylsulfonium, p-toluenesulfonic acid trimethyl Phosphorium, trifluoromethanesulfonic acid cyclohexylmethyl (2-oxocyclohexyl) sulfonium, p-toluenesulfonic acid cyclohexylmethyl (2-oxocyclohexyl) sulfonium, trifluoromethanesulfonic acid dimethylphenylsulfonium, p-toluene Sulfonic acid dimethylphenylsulfonium, trifluoromethanesulfonic acid dicyclohexylphenylsulfonium, p-toluenesulfonic acid dicyclohexylphenylsulfonium, trifluoromethanesulfonic acid trinaphthylsulfonium, trifluoromethanesulfonic acid cyclohexylmethyl (2- Oxocyclohexyl) sulfonium, trifluoromethanesulfonic acid (2-norbornyl) methyl (2-oxocyclohexyl) sulfonium, ethylene bis [methyl (2-oxocyclopentyl) sulfonium trifluoromethanesulfonate], Onium salts such as 1,2'-naphthylcarbonylmethyl tetrahydrothiophenium triflate, bis (benzenesulfonyl) diazomethane, bis (p-toluenesulfonyl) diazomethane, bis (xylenesulfonyl) Diazomethane, Bis (Cicle Lohexylsulfonyl) diazomethane, bis (cyclopentylsulfonyl) diazomethane, bis (n-butylsulfonyl) diazomethane, bis (isobutylsulfonyl) diazomethane, bis (sec-butylsulfonyl) Diazomethane, bis (n-propylsulfonyl) diazomethane, bis (isopropylsulfonyl) diazomethane, bis (tert-butylsulfonyl) diazomethane, bis (n-amylsulfonyl) diazomethane , Bis (isoamylsulfonyl) diazomethane, bis (sec-amylsulfonyl) diazomethane, bis (tert-amylsulfonyl) diazomethane, 1-cyclohexylsulfonyl-1- (tert-butylsul Diazo, such as fonyl) diazomethane, 1-cyclohexylsulfonyl-1- (tert-amylsulfonyl) diazomethane, and 1-tert-amylsulfonyl-1- (tert-butylsulfonyl) diazomethane Methane derivatives, bis-0- (p-toluenesulfonyl) -α-dimethylglyoxime, bis-0- (p-toluenesulfonyl) -α-diphenylglyoxime, bis-0- (p-toluenesulfonyl ) -α-dicyclohexylglyoxime, bis-O- (p-toluenesulfonyl) -2,3-pentanedione Lyoxime, bis-O- (p-toluenesulfonyl) -2-methyl-3,4-pentanedioneglyoxime, bis-O- (n-butanesulfonyl) -α-dimethylglyoxime, bis-O- (n-butanesulfonyl) -α-diphenylglyoxime, bis-O- (n-butanesulfonyl) -α-dicyclohexylglyoxime, bis-O- (n-butanesulfonyl) -2,3 -Pentanedioneglyoxime, bis-O- (n-butanesulfonyl) -2-methyl-3,4-pentanedioneglyoxime, bis-0- (methanesulfonyl) -α-dimethylglyoxime, bis-0 -(Trifluoromethanesulfonyl) -α-dimethylglyoxime, bis-0- (1,1,1-trifluoroethanesulfonyl) -α-dimethylglyoxime, bis-O- (tert-butanesul Ponyl)-α-dimethylglyoxime, bis-0- (perfluorooctanesulfonyl) -α-dimethylglyoxime, bis-0- (cyclohexanesulfonyl) -α-dimethylglyoxime, bis-0- ( Benzenesulfonyl) -α-dimethylglyoxime, bis-0- (p-fluorobenzenesulfonyl) -α-dimethylglyoxime, bis-O- (p-tert-butylbenzenesulfonyl) -α-dimethylglycol Oxime, bis-0- (xylenesulfonyl) -α-dimeth Glyoxime derivatives such as glyoxime and bis-0- (campasulfonyl) -α-dimethylglyoxime, bisnaphthylsulfonylmethane, bistrifluoromethylsulfonylmethane, bismethylsulfonylmethane, bisethylsulfonylmethane , Bissulfon derivatives such as bispropylsulfonylmethane, bisisopropylsulfonylmethane, bis-p-toluenesulfonylmethane and bisbenzenesulfonyl methane, 2-cyclohexylcarbonyl-2- (p-toluenesulfonyl) Β-ketosulfone derivatives such as propane and 2-isopropylcarbonyl-2- (p-toluenesulfonyl) propane, disulfone derivatives such as diphenyldisulfone and dicyclohexyl disulfone, p-toluenesulfonic acid 2,6 -Nitrobenzylsulfonate derivatives such as dinitrobenzyl and p-toluenesulfonic acid 2,4-dinitrobenzyl, 1,2,3-tris (methanesulfonyloxy) benzene, 1,2,3-tris (trifluoro Sulfonic acid ester derivatives such as methanesulfonyloxy) benzene, 1,2,3-tris (p-toluenesulfonyloxy) benzene, and N-hydroxysuccinate Mid methanesulfonic acid ester, N-hydroxysuccinimide trifluoromethanesulfonic acid ester, N-hydroxysuccinimide ethanesulfonic acid ester, N-hydroxysuccinimide 1-propanesulfonic acid ester, N-hydroxysuccinimide 2-propanesulfonic acid ester, N-hydroxysuccinimide 1-pentanesulfonic acid ester, N-hydroxysuccinimide 1-octanesulfonic acid ester, N-hydroxysuccinimide p-toluenesulfonic acid ester, N-hydroxysuccinate Imide p-methoxybenzenesulfonic acid ester, N-hydroxysuccinimide 2-chloroethanesulfonic acid ester, N-hydroxysuccinimide benzenesulfonic acid ester, N-hydroxysuccinimide-2,4,6-trimethyl Benzenesulfonic acid ester, N-hydroxysuccinimide 1-naphthalenesulfonic acid ester, N-hydroxysuccinimide 2-naphthalenesulfonic acid ester, N-hydroxy-2-phenylsuccinimide methanesulfonic acid ester, N-hydroxymal Imide methanesulfonic acid ester, N-hydroxymaleimide ethanesulfonic acid ester, N-hydroxy-2-phenylmaleimide methanesulfonic acid ester, N-hydroxyglutalimide methanesulfonic acid ester, N-hydroxyglutalimide Benzenesulfonic acid ester, N-hydroxyphthalimide methanesulfonic acid ester, N-hydroxyphthalimide benzenesulfonic acid ester, N-hydroxyphthalimide trifluoromethanesulfonic acid ester, N-hydroxyphthalimide p-toluene Sulfonic acid ester, N-hydroxynaphthalimide methanesulfonic acid ester, N-hydroxynaphthalimide benzenesulfonic acid ester, N-hydroxy-5-norbornene-2,3-dicarboxyimide methanesulfonic acid ester, N N, such as -hydroxy-5-norbornene-2,3-dicarboxyimide trifluoromethanesulfonic acid ester and N-hydroxy-5-norbornene-2,3-dicarboxyimide p-toluenesulfonic acid ester -Hide Sulfonic acid ester derivatives of a siimide compound, and the like, but trifluoromethanesulfonic acid triphenylsulfonium, trifluoromethanesulfonic acid (p-tert-butoxyphenyl) diphenylsulfonium, trifluoromethanesulfonic acid tris (p -tert-butoxyphenyl) sulfonium, p-toluenesulfonic acid triphenylsulfonium, p-toluenesulfonic acid (p-tert-butoxyphenyl) diphenylsulfonium, p-toluenesulfonic acid tris (p-tert-butoxyphenyl ) Sulfonium, trifluoromethanesulfonic acid trinaphthylsulfonium, trifluoromethanesulfonic acid cyclohexylmethyl (2-oxocyclohexyl) sulfonium, trifluoromethanesulfonic acid (2-norbornyl) methyl (2-oxocyclohexyl Onium salts such as sulfonium, 1,2'-naphthylcarbonylmethyl tetrahydrothiophenium triflate, bis (benzenesulfonyl) diazomethane, bis (p-toluenesulfonyl) diazomethane, bis ( Cyclohexylsulfonyl) diazomethane, bis (n-butylsulfonyl) diazomethane, Bis (isobutylsulfonyl) diazomethane, bis (sec-butylsulfonyl) diazomethane, bis (n-propylsulfonyl) diazomethane, bis (isopropylsulfonyl) diazomethane, bis (tert- Diazomethane derivatives such as butylsulfonyl) diazomethane, bis-0- (p-toluenesulfonyl) -α-dimethylglyoxime, bis-O- (n-butanesulfonyl) -α-dimethylglyoxime, etc. Glyoxime derivatives, bis sulfone derivatives such as bisnaphthylsulfonylmethane, N-hydroxysuccinimide methanesulfonic acid ester, N-hydroxysuccinimide trifluoromethanesulfonic acid ester, N-hydroxysuccinimide 1- Propanesulfonic acid ester, N-hydroxysuccinimide 2-propanesulfonic acid ester, N-hydroxysuccinimide 1-pentanesulfonic acid ester, N-hydroxysuccinimide p-toluenesulfonic acid ester, N-hydroxynaphthali N-hydrides such as mid methanesulfonic acid ester and N-hydroxynaphthalimide benzenesulfonic acid ester Sulfonate ester derivatives of the doxyimide compound are preferably used. In addition, the said acid generator can be used individually by 1 type or in combination of 2 or more type. Since the onium salt is excellent in the rectangularity improving effect, and the diazomethane derivative and the glyoxime derivative are excellent in standing wave reduction effect, it is possible to fine-tune a profile by combining both.
[189] The addition amount of the acid generator is preferably 0.1 to 15 parts, more preferably 0.5 to 8 parts with respect to 100 parts by weight of the base resin (the same by weight or less). When less than 0.1 part, sensitivity may be bad, and when more than 15 parts, transparency may become low and resolution may fall.
[190] The organic solvent used in the present invention may be any organic solvent capable of dissolving a base resin, an acid generator, and other additives. As such an organic solvent, for example, ketones such as cyclohexanone and methyl-2-n-amyl ketone, 3-methoxybutanol, 3-methyl-3-methoxybutanol, 1-methoxy-2-propanol, 1 Alcohols such as ethoxy-2-propanol, ethers such as propylene glycol monomethyl ether, ethylene glycol monomethyl ether, propylene glycol monoethyl ether, ethylene glycol monoethyl ether, propylene glycol dimethyl ether and diethylene glycol dimethyl ether , Propylene glycol monomethyl ether acetate, propylene glycol monoethyl ether acetate, ethyl lactate, ethyl pyruvate, butyl acetate, methyl 3-methoxypropionate, ethyl 3-ethoxypropionate, tert-butyl acetate, tert-butyl propionate, propylene glycol Esters such as mono-tert-butyl ether acetate, and the like, and may be used alone or in combination of two or more thereof. Although it is possible, it is not limited to these. In the present invention, among these organic solvents, propylene glycol monomethyl ether acetate, which is a safe solvent, and a mixed solvent thereof, in addition to diethylene glycol dimethyl ether or 1-ethoxy-2-propanol, which are excellent in solubility of the acid generator in the resist component, are preferably used. Used.
[191] The amount of the organic solvent to be used is preferably 200 to 1,000 parts, particularly 400 to 800 parts, based on 100 parts of the base resin.
[192] To the resist material of the present invention, a polymer compound separate from the polymer compound containing the repeating unit represented by Formula 1-1 or 1-2 may be further added.
[193] Specific examples of the polymer compound include, but are not limited to, those having a weight average molecular weight of 1,000 to 500,000, preferably 5,000 to 100,000, represented by the following general formula R1 and / or the following general formula R2.
[194]
[195] Wherein R ⁰⁰¹ represents a hydrogen atom, a methyl group or CH ₂ CO ₂ R ⁰⁰³ , R ⁰⁰² represents a hydrogen atom, a methyl group or CO ₂ R ⁰⁰³ , and R ⁰⁰³ is a straight, branched or Cyclic alkyl group, R ⁰⁰⁴ represents a hydrogen atom or a monovalent hydrocarbon group containing a carboxyl group or hydroxyl group having 1 to 15 carbon atoms, and at least one of R ⁰⁰⁵ to R ⁰⁰⁸ contains 1 carboxyl group or hydroxyl group having 1 to 15 carbon atoms A hydrocarbon group, and the rest each independently represent a hydrogen atom or a linear, branched or cyclic alkyl group having 1 to 15 carbon atoms, and R ⁰⁰⁵ to R ⁰⁰⁸ may form a ring with each other, in which case R ⁰⁰⁵ to R One or more of ⁰⁰⁸ represents a divalent hydrocarbon group containing a carboxyl group or a hydroxyl group having 1 to 15 carbon atoms, and the remaining ones each independently represent a single bond or carbon number. A linear, branched, cyclic alkylene group of 1 to 15 is represented, R ⁰⁰⁹ represents a monovalent hydrocarbon group containing a C3-C15 -CO ₂ -partial structure, and at least one of R ⁰¹⁰ to R ⁰¹³ is carbon Monovalent hydrocarbon group containing a 2 to 15 -C0 ₂ -partial structure, each independently represent a hydrogen atom or a linear, branched or cyclic alkyl group of 1 to 15 carbon atoms, R ⁰¹⁰ to R ⁰¹³ is It may form a ring with each other, in which case at least one of R ⁰¹⁰ to R ⁰¹³ represents a divalent hydrocarbon group containing a -CO ₂ -partial structure having 1 to 15 carbon atoms, and the remaining ones are each independently a single bond or 1 to C carbon atoms. A linear, branched or cyclic alkylene group of 15, R ⁰¹⁴ represents an alkyl group containing a polycyclic hydrocarbon group or a polycyclic hydrocarbon group having 7 to 15 carbon atoms, and R ⁰¹⁵ is an acid An unstable group, R ⁰¹⁶ represents a hydrogen atom or a methyl group, R ⁰¹⁷ represents a linear, branched or cyclic alkyl group having 1 to 8 carbon atoms, X represents CH ₂ or an oxygen atom, k is 0 or 1 , a1 ', a2', a3 ', b1', b2 ', b3', c1 ', c2', c3 ', d1', d2 ', d3', e 'is a number greater than 0 and less than 1, and a1' satisfies + a2 '+ a3' + b1 '+ b2' + b3 '+ c1' + c2 '+ c3' + d1 '+ d2' + d3 '+ e' = 1, f ', g', and h ' , i ', j' is a number equal to or greater than 0 and less than 1, and satisfies f '+ g' + h '+ i' + j '= 1)
[196] In addition, about the specific example of each group, it is the same as that mentioned previously.
[197] The blending ratio of the polymer compound separate from the polymer compound containing the repeating unit represented by Formula 1-1 or 1-2 is within a weight ratio of 100: 0 to 10:90, particularly 100: 0 to 20:80. It is desirable to have. When the compounding ratio of the high molecular compound containing the repeating unit represented by the formula (1-1) or (1-2) is smaller than this, there is a case where desirable performance as a resist material is not obtained. The performance of a resist material can be adjusted by changing suitably the said mixing | blending ratio.
[198] In addition, the said high molecular compound is not limited to 1 type, It can add 2 or more types. By using a plurality of high molecular compounds, the performance of the resist material can be adjusted.
[199] The dissolution control agent can be further added to the resist material of the present invention. As the dissolution control agent, the average molecular weight is 100 to 1,000, preferably 150 to 800, and at the same time, the hydrogen atom of the phenolic hydroxyl group of the compound having two or more phenolic hydroxyl groups in the molecule is averaged from 0 to 100 mol as a whole by an acid labile group. The compound which substituted the hydrogen atom of the said carboxyl group of the compound substituted by the ratio of% or the compound which has a carboxyl group in a molecule | numerator in the ratio of 50-100 mol% on average by an acid labile group is mix | blended.
[200] In addition, the ratio which substituted the hydrogen atom of phenolic hydroxyl group by the acid labile group is 0 mol% or more, Preferably it is 30 mol% or more of the whole phenolic hydroxyl group, The upper limit is 100 mol%, More preferably, 80 mol %to be. The ratio which substituted the hydrogen atom of the carboxyl group by the acid labile group is 50 mol% or more of the whole carboxyl group on average, Preferably it is 70 mol% or more, and the upper limit is 100 mol%.
[201] In this case, as a compound which has two or more such phenolic hydroxyl groups, or a compound which has a carboxyl group, what is represented by following formula (D1-D14) is preferable.
[202]
[203] (Wherein R ²⁰¹ and R ²⁰² each represent a hydrogen atom or a linear or branched alkyl or alkenyl group having 1 to 8 carbon atoms, and R ²⁰³ is a hydrogen atom or a straight or branched carbon group having 1 to 8 carbon atoms) Alkyl group or alkenyl group or-(R ²⁰⁷ ) _h COOH, R ²⁰⁴ is-(CH ₂ ) _i- (i = 2 to 10), arylene group having 6 to 10 carbon atoms, carbonyl group, sulfonyl group, oxygen atom Or a sulfur atom, R ²⁰⁵ represents an alkylene group having 1 to 10 carbon atoms, an arylene group having 6 to 10 carbon atoms, a carbonyl group, a sulfonyl group, an oxygen atom, or a sulfur atom, and R ²⁰⁶ represents a hydrogen atom, a carbon group having 1 to 8 carbon atoms A linear or branched alkyl group, an alkenyl group, or a phenyl group or a naphthyl group substituted with a hydroxyl group, respectively, R ²⁰⁷ represents a linear or branched alkylene group having 1 to 10 carbon atoms, and R ²⁰⁸ represents a hydrogen atom or a hydroxyl group J is O Is an integer of 5, u, h is 0 or 1, and s, t, s', t ', s'', t '' are respectively s + t = 8, s' + t '= 5, s' satisfies '+ t' = 4 and at the same time has at least one hydroxyl group in each phenyl skeleton, and α is a number having a molecular weight of 100 to 1,000 of the compounds of the formulas D8 and D9)
[204] In the above formula, R ²⁰¹ , R ²⁰² is, for example, a hydrogen atom, methyl group, ethyl group, butyl group, propyl group, ethynyl group, cyclohexyl group, R ²⁰³ is, for example, the same as R ²⁰¹ , R ²⁰² , or- COOH, —CH ₂ COOH, R ²⁰⁴ is, for example, an ethylene group, a phenylene group, a carbonyl group, a sulfonyl group, an oxygen atom, a sulfur atom, etc., and R ²⁰⁵ is, for example, the same as a methylene group, or R ²⁰⁴ , as R ²⁰⁶ . Examples thereof include a hydrogen atom, a methyl group, an ethyl group, a butyl group, a propyl group, an ethynyl group, a cyclohexyl group, a phenyl group substituted with a hydroxyl group, and a naphthyl group.
[205] Although it can be used variously as an acid labile group of a dissolution control agent, Specifically, the group represented by following formula L1-L4, the C4-C20 tertiary alkyl group, the trialkylsilyl group of C1-C6 of each alkyl group, carbon number 4 to 20 oxoalkyl group etc. are mentioned.
[206]
[207] (Wherein, R ^L01 and R ^L02 represent a hydrogen atom or a linear, branched or cyclic alkyl group having 1 to 18 carbon atoms, and R ^L03 is monovalent which may have a hetero atom such as an oxygen atom having 1 to 18 carbon atoms). ^{Represents a} hydrocarbon group, and R ^L01 and R ^L02 , R ^L01 and R ^L03 , R ^L02 and R ^L03 may form a ring, and when forming a ring, R ^L01 , R ^L02 and R ^L03 each have a carbon number of 1 to 18 carbon atoms. A linear or branched alkylene group, R ^L04 is a C4-C20 tertiary alkyl group, each alkyl group is represented by a C1-C6 trialkylsilyl group, a C4-C20 oxoalkyl group or the above formula L1 Group, R ^L05 represents a monovalent hydrocarbon group which may contain a hetero atom having 1 to 8 carbon atoms or an aryl group which may be substituted with 6 to 20 carbon atoms, and R ^L06 may contain a hetero atom having 1 to 8 carbon atoms There Represents a monovalent hydrocarbon group or an aryl group which may be substituted having 6 to 20, R ^L07 to R ^L16 each independently represents a monovalent hydrocarbon group which may contain a hydrogen atom or a hetero atom having 1 to 15, R ^L07 To R ^L16 may form a ring with each other, and in that case, a divalent hydrocarbon group which may include a hetero atom having 1 to 15 carbon atoms, and R ^L07 to R ^L16 are directly bonded to those bonded to adjacent carbons. May form a double bond, y is an integer from 0 to 6, m is 0 or 1, n is any one of 0, 1, 2, 3, and 2m + n = 2 or 3)
[208] In addition, the specific example of each group is the same as that of the above description.
[209] The compounding quantity of the said dissolution control agent is 0-50 parts with respect to 100 parts of base resin, Preferably it is 0-40 parts, More preferably, it is 0-30 parts, It can use individually or in mixture of 2 or more types. When the compounding quantity exceeds 50 parts, film reduction of the pattern may occur and the resolution may decrease.
[210] In addition, the above dissolution control agent is synthesized by introducing an acid labile group to the compound having a phenolic hydroxyl group or carboxyl group using an organic chemical formulation.
[211] In addition, a basic compound can be mix | blended with the resist material of this invention.
[212] As the basic compound, a compound capable of suppressing the diffusion rate when the acid generated from the acid generator is diffused into the resist film is suitable. By compounding a basic compound, the diffusion rate of an acid in a resist film is suppressed, the resolution is improved, the change in sensitivity after exposure can be suppressed, or the exposure margin, pattern profile, etc. can be improved by reducing the substrate or environmental dependence.
[213] As such basic compounds, primary, secondary and tertiary aliphatic amines, hybrid amines, aromatic amines, heterocyclic amines, nitrogen-containing compounds having a carboxyl group, nitrogen-containing compounds having a sulfonyl group, nitrogen-containing compounds having a hydroxyl group, and hydroxides The nitrogen containing compound which has a oxyphenyl group, an alcoholic nitrogen containing compound, an amide derivative, an imide derivative, etc. are mentioned.
[214] Specifically, as the primary aliphatic amines, ammonia, methylamine, ethylamine, n-propylamine, isopropylamine, n-butylamine, isobutylamine, sec-butylamine, tert-butylamine, pentylamine, tert-amyl Amine, cyclopentylamine, hexylamine, cyclohexylamine, heptylamine, octylamine, nonylamine, decylamine, dodecylamine, cetylamine, methylenediamine, ethylenediamine, tetraethylenepentamine and the like are exemplified, and secondary aliphatic As amines, dimethylamine, diethylamine, di-n-propylamine, diisopropylamine, di-n-butylamine, diisobutylamine, di-sec-butylamine, dipentylamine, dicyclopentylamine, di Hexylamine, dicyclohexylamine, diheptylamine, dioctylamine, dinonylamine, didecylamine, didodecylamine, dicetylamine, N, N-dimethylmethylenediamine, N, N-dimethylethylenediamine, N, N-dimethyl tetraethylene pentamine etc. are illustrated, and tertiary aliphatic amines are mentioned. West trimethylamine, triethylamine, tri-n-propylamine, triisopropylamine, tri-n-butylamine, triisobutylamine, tri-sec-butylamine, tripentylamine, tricyclopentylamine, trihexyl Amines, tricyclohexylamine, triheptylamine, trioctylamine, trinonylamine, tridecylamine, tridodecylamine, tricetylamine, N, N, N ', N'-tetramethylmethylenediamine, N, N , N ', N'-tetramethylethylenediamine, N, N, N', N'-tetramethyltetraethylenepentamine and the like are exemplified.
[215] In addition, examples of the mixed amines include dimethylethylamine, methylethylpropylamine, benzylamine, phenethylamine, benzyldimethylamine, and the like. Specific examples of aromatic amines and heterocyclic amines include aniline derivatives (e.g., aniline, N-methylaniline, N-ethylaniline, N-propylaniline, N, N-dimethylaniline, 2-methylaniline, 3-methylaniline , 4-methylaniline, ethylaniline, propylaniline, trimethylaniline, 2-nitroaniline, 3-nitroaniline, 4-nitroaniline, 2,4-dinitroaniline, 2,6-dinitroaniline, 3,5- Dinitroaniline, N, N-dimethyltoluidine, etc.), diphenyl (p-tolyl) amine, methyldiphenylamine, triphenylamine, phenylenediamine, naphthylamine, diaminonaphthalene, pyrrole derivatives (e.g. pyrrole , 2H-pyrrole, 1-methylpyrrole, 2,4-dimethylpyrrole, 2,5-dimethylpyrrole, N-methylpyrrole, etc.), oxazole derivatives (for example oxazole, isoxazole, etc.), thiazole derivatives (E.g. thiazole, isothiazole, etc.), imidazole derivatives (e.g. imidazole, 4-methylimidazole, 4-methyl-2-phenylimidazole, etc.), Lazole derivatives, furazane derivatives, pyrroline derivatives (e.g. pyrroline, 2-methyl-1-pyrroline, etc.), pyrrolidine derivatives (e.g. pyrrolidine, N-methylpyrrolidine, pyrrolidinone , N-methylpyrrolidone, etc.), imidazoline derivatives, imidazolidine derivatives, pyridine derivatives (e.g. pyridine, methylpyridine, ethylpyridine, propylpyridine, butylpyridine, 4- (1-butylpentyl) pyridine , Dimethylpyridine, trimethylpyridine, triethylpyridine, phenylpyridine, 3-methyl-2-phenylpyridine, 4-tert-butylpyridine, diphenylpyridine, benzylpyridine, methoxypyridine, butoxypyridine, dimethoxypyridine, 1 -Methyl-2-pyridine, 4-pyrrolidinopyridine, 1-methyl-4-phenylpyridine, 2- (1-ethylpropyl) pyridine, aminopyridine, dimethylaminopyridine and the like), pyridazine derivatives, pyrimidine derivatives, Pyrazine derivatives, pyrazoline derivatives, pyrazolidine derivatives, piperidine derivatives, piperazine derivatives, Morpholine derivatives, indole derivatives, isoindole derivatives, 1H-indazole derivatives, indolin derivatives, quinoline derivatives (e.g. quinoline, 3-quinolinecarbonitrile, etc.), isoquinoline derivatives, cinnoline derivatives, quinazoline derivatives, quinoxine Saline derivatives, phthalazine derivatives, purine derivatives, pteridine derivatives, carbazole derivatives, phenanthridine derivatives, acridine derivatives, phenadine derivatives, 1,10-phenanthroline derivatives, adenine derivatives, adenosine derivatives, guanine Derivatives, guanosine derivatives, uracil derivatives, uridine derivatives and the like.
[216] As the nitrogen-containing compound having a carboxyl group, for example, aminobenzoic acid, indolecarboxylic acid, amino acid derivatives (for example, nicotinic acid, alanine, arginine, aspartic acid, glutamic acid, glycine, histidine, isoleucine, glycylosin, leucine, Methylonine, phenylalanine, threonine, lysine, 3-aminopyrazine-2-carboxylic acid, methoxyalanine), and the like, and nitrogen-containing compounds having a sulfonyl group include 3-pyridine sulfonic acid, p-toluene sulfonic acid pyridinium, and the like. Illustrative examples of the nitrogen-containing compound having a hydroxyl group, the nitrogen-containing compound having a hydroxyphenyl group, and the alcoholic nitrogen-containing compound include 2-hydroxypyridine, aminocresol, 2,4-quinolinediol, 3-indolmethanol hydrate and monoethanol. Amine, diethanolamine, triethanolamine, N-ethyldiethanolamine, N, N-diethylethanolamine, triisopropanolamine, 2,2'-imino diethanol, 2-aminoethanol, 3-amino-1-propanol, 4-amino-1-butanol, 4- (2-hydroxyethyl) morpholine, 2- (2-hydroxyethyl) pyridine, 1- (2-hydroxy Hydroxyethyl) piperazine, 1- [2- (2-hydroxyethoxy) ethyl] piperazine, piperidineethanol, 1- (2-hydroxyethyl) pyrrolidine, 1- (2-hydroxyethyl ) -2-pyrrolidinone, 3-piperidino-1,2-propanediol, 3-pyrrolidino-1,2-propanediol, 8-hydroxyurorizine, 3-quinuclidinol, 3-tro Panol, 1-methyl-2-pyrrolidinethanol, 1-aziridineethanol, N- (2-hydroxyethyl) phthalimide, N- (2-hydroxyethyl) isonicotinamide, etc. are illustrated. Examples of the amide derivatives include formamide, N-methylformamide, N, N-dimethylformamide, acetamide, N-methylacetamide, N, N-dimethylacetamide, propionamide, benzamide and the like. Phthalimide, succinimide, maleimide, etc. are illustrated as an imide derivative.
[217] Moreover, 1 type, or 2 or more types chosen from the basic compound represented by following formula (B1) can also be added.
[218] N (X) _n (Y) _3-n (B) 1
[219] In the formula, n = 1, 2, 3. The side chains X may be the same or different and may be represented by the following formulas X1 to X3. The side chain Y represents a hydrogen atom or a linear, branched or cyclic alkyl group having 1 to 20 carbon atoms, which may be the same or different, and may include an ether group or a hydroxyl group. In addition, X may be bonded to each other to form a ring.
[220]
[221] R ³⁰⁰ , R ³⁰² and R ³⁰⁵ represent a linear, branched alkylene group having 1 to 4 carbon atoms, and R ³⁰¹ and R ³⁰⁴ represent a hydrogen atom, a linear, branched or cyclic alkyl group having 1 to 20 carbon atoms. One or more hydroxy group, ether group, ester group, and lactone ring may be included.
[222] R ³⁰³ is a single bond, linear, branched alkylene group having 1 to 4 carbon atoms, R ³⁰⁶ is a linear, branched, cyclic alkyl group having 1 to 20 carbon atoms, and is a hydroxy group, ether group, ester group, lactone ring It may also contain one or more.
[223] The compound represented by said B1 is specifically illustrated below.
[224] Tris (2-methoxymethoxyethyl) amine, tris {2- (2-methoxyethoxy) ethyl} amine, tris {2- (2-methoxyethoxymethoxy) ethyl} amine, tris {2- (1-methoxyethoxy) ethyl} amine, tris {2- (1-ethoxyethoxy) ethyl} amine, tris {2- (1-ethoxypropoxy) ethyl} amine, tris [2- {2 -(2-hydroxyethoxy) ethoxy} ethyl] amine, 4,7,13,16,21,24-hexaoxa-1,10-diazabicyclo [8.8.8] hexacoic acid, 4,7, 13,18-tetraoxa-1,10-diazabicyclo [8.5.5] eichoic acid, 1,4,10,13-tetraoxa-7,16-diazabicyclooctadecane, 1-aza-12-crown -4,1-Aza-15-crown-5,1-aza-18-crown-6, tris (2-formyloxyethyl) amine, tris (2-formyloxyethyl) amine, tris (2-ace Methoxyethyl) amine, tris (2-propionyloxyethyl) amine, tris (2-butyryloxyethyl) amine, tris (2-isobutyryloxyethyl) amine, tris (2- valeryloxyethyl) amine, Tris (2-pivaloyloxyethyl) Min, N, N-bis (2-acetoxyethyl) 2- (acetoxyacetoxy) ethylamine, tris (2-methoxycarbonyloxyethyl) amine, tris (2-tert-butoxycarbonyloxyethyl ) Amine, tris [2- (2-oxopropoxy) ethyl] amine, tris [2- (methoxycarbonylmethyl) oxyethyl] amine, tris [2- (tert-butoxycarbonylmethyloxy) ethyl] Amine, tris [2- (cyclohexyloxycarbonylmethyloxy) ethyl] amine, tris (2-methoxycarbonylethyl) amine, tris (2-ethoxycarbonylethyl) amine, N, N-bis ( 2-hydroxyethyl) 2- (methoxycarbonyl) ethylamine, N, N-bis (2-acetoxyethyl) 2- (methoxycarbonyl) ethylamine, N, N-bis (2-hydroxy Ethyl) 2- (ethoxycarbonyl) ethylamine, N, N-bis (2-acetoxyethyl) 2- (ethoxycarbonyl) ethylamine, N, N-bis (2-hydroxyethyl) 2- (2-methoxyethoxycarbonyl) ethylamine, N, N-bis (2-acetoxyethyl) 2- (2-methoxyethoxycarbonyl) ethylamine, N, N-ratio (2-hydroxyethyl) 2- (2-hydroxyethoxycarbonyl) ethylamine, N, N-bis (2-acetoxyethyl) 2- (2-acetoxyethoxycarbonyl) ethylamine, N , N-bis (2-hydroxyethyl) 2-[(methoxycarbonyl) methoxycarbonyl] ethylamine, N, N-bis (2-acetoxyethyl) 2-[(methoxycarbonyl) meth Oxycarbonyl] ethylamine, N, N-bis (2-hydroxyethyl) 2- (2-oxopropoxycarbonyl) ethylamine, N, N-bis (2-acetoxyethyl) 2- (2- Oxopropoxycarbonyl) ethylamine, N, N-bis (2-hydroxyethyl) 2- (tetrahydroflufuryloxycarbonyl) ethylamine, N, N-bis (2-acetoxyethyl) 2- ( Tetrahydroflufuryloxycarbonyl) ethylamine, N, N-bis (2-hydroxyethyl) 2-[(2-oxotetrahydrofuran-3-yl) oxycarbonyl] ethylamine, N, N-bis (2-acetoxyethyl) 2-[(2-oxotetrahydrofuran-3-yl) oxycarbonyl] ethylamine, N, N-bis (2-hydroxyethyl) 2- (4-hydroxybutoxy Carbo Nyl) ethylamine, N, N-bis (2-formyloxyethyl) 2- (4-formyloxybutoxycarbonyl) ethylamine, N, N-bis (2-formyloxyethyl) 2- ( 2-formyloxyethoxycarbonyl) ethylamine, N, N-bis (2-methoxyethyl) 2- (methoxycarbonyl) ethylamine, N- (2-hydroxyethyl) bis [2- ( Methoxycarbonyl) ethyl] amine, N- (2-acetoxyethyl) bis [2- (methoxycarbonyl) ethyl] amine, N- (2-hydroxyethyl) bis [2- (ethoxycarbonyl ) Ethyl] amine, N- (2-acetoxyethyl) bis [2- (ethoxycarbonyl) ethyl] amine, N- (3-hydroxy-1-propyl) bis [2- (methoxycarbonyl) Ethyl] amine, N- (3-acetoxy-1-propyl) bis [2- (methoxycarbonyl) ethyl] amine, N- (2-methoxyethyl) bis [2- (methoxycarbonyl) ethyl ] Amine, N-butylbis [2- (methoxycarbonyl) ethyl] amine, N-butylbis [2- (2-methoxyethoxycarbonyl) ethyl] amine, N-methylbis (2-acetoxy Ethyl) amine, N-ethylbis (2-acetoxyethyl) amine, N-meth Bis (2-pivaloyloxyethyl) amine, N-ethylbis [2- (methoxycarbonyloxy) ethyl] amine, N-ethylbis [2- (tert-butoxycarbonyloxy) ethyl] amine, Tris (methoxycarbonylmethyl) amine, tris (ethoxycarbonylmethyl) amine, N-butylbis (methoxycarbonylmethyl) amine, N-hexylbis (methoxycarbonylmethyl) amine, β- ( Diethylamino) -δ-valerolactone can be exemplified, but is not limited to these.
[225] The compounding quantity of the said basic compound is 0.001-10 parts with respect to 1 part of acid generators, Preferably it is 0.01-1 part. If the amount is less than 0.001 part, the effect as an additive may not be sufficiently obtained, while if it is more than 10 parts, resolution and sensitivity may be lowered.
[226] The resist material of the present invention can also contain a compound having a group represented by ≡C-COOH in the molecule.
[227] As a compound which has group represented by -C-COOH in a molecule | numerator, 1 type (s) or 2 or more types of compounds chosen from the following group I and II can be used, for example, It is not limited to these. By combining this component, the PED stability of the resist is improved, and the edge roughness on the nitride film substrate is improved.
[228] [Group I]
[229] Some or all of the hydrogen atoms of the phenolic hydroxyl groups of the compounds represented by formulas A1 to A10 are substituted by -R ⁴⁰¹ -COOH (R ⁴⁰¹ is a linear or branched alkylene group having 1 to 10 carbon atoms); And at the same time the molar ratio between the phenolic hydroxyl group (C) in the molecule and the group (D) represented by ≡C-COOH is C / (C + D) = 0.1 to 1.0.
[230] [Group II]
[231] Compounds represented by the following formulas A11 to A15.
[232]
[233] (Wherein R ⁴⁰⁸ represents a hydrogen atom or a methyl group, R ⁴⁰² , R ⁴⁰³ represent a hydrogen atom or a linear or branched alkyl or alkenyl group having 1 to 8 carbon atoms, respectively, and R ⁴⁰⁴ represents a hydrogen atom or carbon number) A linear or branched alkyl or alkenyl group of 1 to 8, or a-(R ⁴⁰⁹ ) _h -COOR 'group (R' represents a hydrogen atom or -R ⁴⁰⁹ -COOH), and R ⁴⁰⁵ represents-(CH ₂ ) _i- (i = 2 to 10), an arylene group having 6 to 10 carbon atoms, a carbonyl group, a sulfonyl group, an oxygen atom or a sulfur atom, R ⁴⁰⁶ is an alkylene group having 1 to 10 carbon atoms, an arylene group having 6 to 10 carbon atoms, A carbonyl group, a sulfonyl group, an oxygen atom or a sulfur atom, R ⁴⁰⁷ represents a hydrogen atom or a linear or branched alkyl group having 1 to 8 carbon atoms, an alkenyl group, a phenyl group or a naphthyl group each substituted with a hydroxyl group, and R ⁴⁰⁹ is Straight or branched carbon atoms of 1 to 10 An alkylene group, R ⁴¹⁰ represents a hydrogen atom or a straight or branched alkyl group of 1 to 8 carbon atoms or an alkenyl group or a -R ⁴¹¹ -COOH group, and R ⁴¹¹ represents a straight or branched alkyl group of 1 to 10 carbon atoms Ren, j is an integer from 0 to 5, u, h is 0 or 1, and s1, t1, s2, t2, s3, t3, s4, t4 are s1 + t1 = 8 and s2 + t2 = 5, respectively. , s3 + t3 = 4, s4 + t4 = 6, and at the same time, each having at least one hydroxyl group in each phenyl skeleton, κ is a number having a weight average molecular weight of 1,000 to 5,000, and λ is a chemical formula A7 is a number having a weight average molecular weight of 1,000 to 10, O00)
[234]
[235] (R ⁴⁰² , R ⁴⁰³ , R ⁴¹¹ represent the same meaning as described above, R ⁴¹² represents a hydrogen atom or a hydroxyl group, s5, t5 is s5 ≧ 0, t5 ≧ 0, and a number satisfying s5 + t5 = 5; , h 'is 0 or 1)
[236] Although the compound specifically, shown by following formula (AI-1-14) and AII-1-10 is mentioned as this component, It is not limited to these.
[237]
[238] (R '' represents a hydrogen atom or a CH ₂ COOH group, in each compound 10 to 100 mol% of R '' is a CH ₂ COOH group, α, κ represents the same meaning as above)
[239]
[240] In addition, the compound which has group represented by -C-COOH in the said molecule can be used individually by 1 type or in combination of 2 or more types.
[241] The amount of the compound having a group represented by ≡C-COOH in the molecule is 0 to 5 parts, preferably 0.1 to 5 parts, more preferably 0.1 to 3 parts, even more preferably 0.1 to 5 parts with respect to 100 parts of the base resin. 2 copies. When more than 5 parts, the resolution of a resist material may fall.
[242] Moreover, an acetylene alcohol derivative can be mix | blended with the resist material of this invention as an additive, and, thereby, storage stability can be improved.
[243] As the acetylene alcohol derivative, those represented by the following formulas S1 and S2 can be preferably used.
[244]
[245] (Wherein, R ⁵⁰¹ , R ⁵⁰² , R ⁵⁰³ , R ⁵⁰⁴ , R ⁵⁰⁵ are each a hydrogen atom or a linear, branched or cyclic alkyl group having 1 to 8 carbon atoms, X, Y represents 0 or positive number, 0 ≤ X ≤ 30, 0 ≤ Y ≤ 30, 0 ≤ X + Y ≤ 40 is satisfied)
[246] As the acetylene alcohol derivative, preferably, quinolin 61, sufinol 82, sufinol 104, sufinol 104E, sufinol 104H, sufinol 104A, sufinol TG, sufinol PC, sufinol 440, sufinol 465, sufinol 485 (Made by Air Products and Chemicals Inc.), Sufinol E1004 (made by Nisshin Chemical Industries, Ltd.), etc. are mentioned.
[247] The amount of the acetylene alcohol derivative added is 0.01 to 2% by weight, more preferably 0.02 to 1% by weight in 100% by weight of the resist composition. When less than 0.01 weight%, the effect of improving coating property and storage stability may not be fully acquired, and when more than 2 weight%, the resolution of a resist material may fall.
[248] In addition to the above components, a commonly used surfactant may be added to the resist material of the present invention in order to improve applicability. In addition, the addition amount of an arbitrary component can be made into the normal amount in the range which does not impair the effect of this invention.
[249] Herein, the surfactant is preferably nonionic, and perfluoroalkyl polyoxyethylene ethanol, fluorinated alkyl ester, perfluoroalkylamine oxide, perfluoroalkyl EO adduct, fluorine-containing organosiloxane compound and the like Can be mentioned. For example, Flowride "FC-430", "FC-431" (all are manufactured by Sumitomo 3M Co., Ltd.), Sufron "S-141", "S-145" (all are manufactured by Asahi Glass Co., Ltd.) , United "DS-401", "DS-403", "DS-451" (all manufactured by Daikin Kogyo Co., Ltd.), Megapack "F-8151" (manufactured by Dainippon Ink Kogyo Co., Ltd.), " X-70-092 "," X-70-093 "(all are the Shin-Etsu Chemical Co., Ltd. make), etc. are mentioned. Preferable examples include Flowride "FC-430" (manufactured by Sumitomo 3M Co., Ltd.) and "X-70-093" (manufactured by Shin-Etsu Chemical Co., Ltd.).
[250] In order to form a pattern using the resist material of the present invention, a well-known lithography technique can be employed, and for example, a film thickness of 0.2 to 2.O can be obtained by spin coating or the like on a substrate such as a silicon wafer. It is apply | coated so that it may become micrometer, and this is prebaked at 60-150 degreeC for 1 to 10 minutes, Preferably it is 80 to 130 degreeC on a hotplate for 1 to 5 minutes. Subsequently, a mask for forming a desired pattern is covered on the resist film, and high-energy rays or electron beams such as far ultraviolet rays, excimer lasers, X-rays or the like are exposed at an exposure dose of about 1-200,000 mJ / cm 2, preferably 5-100,000 mJ. After irradiating to about / cm 2, exposure baking (PEB) is performed on the hot plate at 60 to 150 ° C. for 1 to 5 minutes, preferably at 80 to 130 ° C. for 1 to 3 minutes. Further, the dip method is performed for 0.1 to 3 minutes, preferably 0.5 to 2 minutes, using a developing solution of an aqueous alkali solution, such as tetramethylammonium hydroxide (TMAH) at 0.1 to 5%, preferably 2 to 3%. By developing according to conventional methods such as the puddle method, the spray method, and the like, a desired pattern is formed on the substrate. In addition, the material of the present invention is particularly suitable for fine patterning by far ultraviolet rays or excimer lasers, X-rays and electron beams of 248 to 193 nm, even among high energy rays. In addition, when the said range deviates from an upper limit and a lower limit, a desired pattern may not be obtained.
[251] Hereinafter, the present invention will be described in detail with reference examples, synthesis examples, and examples, but the present invention is not limited to the following examples.
[252] <Reference Example>
[253] The synthesis example of the lactone compound used for this invention is shown below.
[254] Reference Example 1
[255] Synthesis of α- {hydroxy (5-norbornene-2-yl) methyl} -γ-butylolactone (monomer 1)
[256] First, lithium enolate was prepared by reacting 184 g of lithium bis (trimethylsilyl) amide and 86 g of γ-butylolactone at -60 ° C in 1 kg of anhydrous tetrahydrofuran under a nitrogen atmosphere. Subsequently, 122 g of 5-norbornene-2-carbaldehyde was slowly added, followed by reaction by raising the temperature to -20 ° C for 1 hour. Next, 1 kg of saturated aqueous ammonium chloride solution was added to terminate the reaction, followed by hexane extraction. The organic layer was washed with water, dehydrated with anhydrous sodium sulfate, filtered and concentrated under reduced pressure. Purification by silica gel column chromatography gave 198 g of α- {hydroxy (5-norbornene-2-yl) methyl} -γ-butylolactone. (Yield 95%) IR (KBr): v = 3436 (br), 3058, 2966, 2867, 1740, 1385, 1336, 1219, 1184, 1024 cm ^-1
[257] ^L H-NMR of the major diastereomers (270 MHz in CDCl ₃ ) δ = 0.52 (1H, m), 1.20-1.45 (2H, m), 1.55-3.25 (9H, m), 4.30-4.45 (2H, m), 6.02 (lH, m), 6.20 (lH, m)
[258] Reference Example 2
[259] Synthesis of α- {hydroxy (5-norbornene-2-yl) methyl} -γ-butylolactone (monomer 1)
[260] 98 g of zinc powder, 247 g of α-bromo-γ-butylolactone, 122 g of 5-norbornene-2-carbaldehyde, and 2 kg of anhydrous tetrahydrofuran were mixed, and heated to reflux for 10 hours under a nitrogen atmosphere. And addition reaction was performed. Next, after cooling, diluted hydrochloric acid was added and the neutralization reaction was performed. The organic layer obtained by hexane extraction was washed with water, dehydrated with anhydrous sodium sulfate, filtered and concentrated under reduced pressure. Purification by silica gel column chromatography gave 148 g of α- {hydroxy (5-norbornene-2-yl) methyl} -γ-butylolactone. (71% yield)
[261] Reference Example 3
[262] Synthesis of α- {acetoxy (5-norbornene-2-yl) methyl} -γ-butylollactone (monomer 2)
[263] 208 g of α- {hydroxy (5-norbornene-2-yl) methyl} -γ-butylolactone (monomer 1) was dissolved in acetic anhydride 123 in 127 g of pyridine in the presence of 6 g of 4-dimethylaminopyridine. It was made to react with g and 25 degreeC for 10 hours. 30 g of water was added to stop the reaction, followed by hexane extraction. The organic layer was washed with water, dehydrated with anhydrous sodium sulfate, filtered and concentrated under reduced pressure, and then purified by silica gel column chromatography to obtain 245 g of α- {acetoxy (5-norbornene-2-yl) methyl} -γ-butylolactone. Was obtained. (Yield 98%)
[264] IR (KBr): ν = 3061, 2974, 2870, 1761, 1728, 1375, 1244, 1161, 1153, 1026 cm ^-1
[265] ^L H-NMR of the major diastereomers (270 MHz in CDCl ₃ ) δ = 0.58 (1H, ddd, J = 11.6, 4.9, 2.4 Hz), 1.30 (1H, m), 1.41 (1H, m), 1.70 -2.50 {6H, m} including 2.11 (3H, s), 2.55-3.05 (4H, m), 4.05-4.30 (2H, m), 4.60 (1H, dd, J = 11.1, 2.4Hz), 5.87 (1H, M), 6.18 (1H, m).
[266] Reference Example 4
[267] Synthesis of α- {1-hydroxy-2- (5-norbornene-2-yl) ethyl} -γ-butylollactone (monomer 3)
[268] Α- {1-hydroxy-2- (5) in the same manner as in Reference Example 1, except that (5-norbornene-2-yl) acetaldehyde was used in place of 5-norbornene-2-carbaldehyde. -Norbornene-2-yl) ethyl} -γ-butylolactone was synthesized (yield 93%).
[269] IR (KBr): ν = 3404 (wide), 3057, 2962, 2937, 2866, 1749, 1380, 1213, 1178, 1024 cm ^-1
[270] ^L H-NMR of the major diastereomers (270 MHz in CDCl ₃ ) δ = 0.51 (1H, m), 0.95-2.90 (12H, m), 3.67 (1H, ddd, J = 10.0, 7.8, 2.7 Hz) , 4.10-4.30 (2H, m), 5.92 (1H, m), 6.12 (1H, m).
[271] Reference Example 5
[272] Synthesis of α- {1-acetoxy-2- (5-norbornene-2-yl) ethyl} -γ-butylollactone (monomer 4)
[273] α- {1-hydroxy-2- (5-norbornene-2- in place of α- {hydroxy (5-norbornene-2-yl) methyl} -γ-butylollactone (monomer 1) (Alpha)-{1-acetoxy-2- (5-norbornene-2-yl) ethyl} -γ in the same manner as in Reference Example 2, except that the ethyl} -γ-butylolactone (monomer 3) was used. Butyl olactone was synthesized (yield 98%).
[274] IR (Thin Film): ν = 3057, 2964, 2868, 1772, 1738, 1373, 1238, 1171, 1161, 1026 cm ^-1
[275] ^L H-NMR of the major diastereomers (270 MHz in CDCl ₃ ) δ = 0.55 (1H, m), 1.15-2.95 {14H, m} including 4.07 (3H, s), 4.10-4.40 (2H, m), 5.36 (1 H, m), 5.93 (1 H, m), 6.11 (1 H, m).
[276]
[277] Synthesis Example
[278] The high molecular compound of this invention was synthesize | combined by the prescription shown below.
[279] Synthesis Example 1
[280] Synthesis of Polymer 1
[281] 52.0 g of α- {hydroxy (5-norbornene-2-yl) methyl} -γ-butylolactone (synthesized in one step from 5-norbornene-2-carbaldehyde), 65.0 g of 5 -Norbornene-2-carboxylic acid 2-ethyl-2-norbornyl and 24.5 g maleic anhydride are dissolved in 150 ml tetrahydrofuran and with 1.8 g 2,2'-azobisisobutyrate Nitrile was added. After stirring for 15 hours at 60 ℃, it was concentrated under reduced pressure. The obtained residue was dissolved in 400 ml of tetrahydrofuran and added dropwise to 10 L of n-hexane. The resulting solid was filtered off, washed again with 10 L of n-hexane, and vacuum dried at 40 DEG C for 6 hours to obtain 71.3 g of a polymer compound represented by the following Polymer 1. The yield was 50.4%.
[282] As a result of analyzing the obtained polymer by GPC, it was confirmed that the weight average molecular weight (Mw) was 7,200 in terms of polystyrene, and the polymer having a degree of dispersion (Mw / Mn) of 1.74. Moreover, the structural unit x, d, and e of the obtained polymer were ^13: C-NMR measurement and x: d: e = 0.25: 0.25: 0.50.
[283] <Synthesis Examples 2 to 12>
[284] Synthesis of Polymers 2 to 12
[285] Polymers 2 to 12 were synthesized in the same manner as above or using known methods.
[286]
[287]
[288]
[289] Example I
[290] The board | substrate adhesiveness at the time of mix | blending with a resist material with a base resin about the high molecular compound of this invention was evaluated.
[291] <Examples I-1 to 5 and Comparative Examples 1 and 2>
[292] An acid generator (PAG 1), a basic compound and a solvent represented by the following formulas are represented by the polymers represented by the above formulas (polymers 1 to 5) and the polymers represented by the following formulas (polymers 13 and 14) as a base resin. Mix with the composition shown in Table 1. These were then filtered through a Teflon filter (pore diameter 0.2 μm) and used as a resist material.
[293]
[294] (PAG 1)
[295] The resist solution was spun onto a silicon wafer sprayed with hexamethylsilazane at 90 ° C. for 40 seconds, heat treated at 110 ° C. for 90 seconds, and a resist film having a thickness of 0.5 μm was formed. This was exposed using a KrF excimer laser stepper (NA = 0.5, manufactured by Nikon Corporation), heat-treated at 110 ° C. for 90 seconds, and then paddle-developed for 60 seconds with an aqueous solution of 2.38% tetramethylammonium hydroxide. The line and space pattern of was formed. The wafer after development was observed with a scanning electron microscope (scanning electron microscope), and the minimum line width (micrometer) which remained without peeling was made into the adhesion limit of an evaluation resist.
[296] Table 1 shows the composition and evaluation results of each resist. In addition, in Table 1, a solvent and a basic compound are as follows. In addition, the solvent used the thing containing 0.1 weight% of FC-430 (made by Sumitomo 3M Co., Ltd.).
[297]
[298] PGMEA: Propylene glycol methyl ether acetate
[299] TBA: tributylamine
[300] From the results of Table 1, it was confirmed that the polymer compound of the present invention has high substrate adhesiveness.
[301] Example II
[302] The resolution of KrF excimer laser exposure was evaluated for the resist material of the present invention.
[303] <Example II-1, 21>
[304] Resolution evaluation of resist
[305] An acid generator (PAG 1,2) represented by the following formula as a polymer (polymers 1 to 12) represented by the above formula, a dissolution control agent (DRR 1 to 4) represented by the following formula, and a basic compound , And a compound (ACC1, 2) having a group represented by) C-COOH and a solvent in a molecule represented by the following formula were mixed in the composition shown in Table 1. These were then filtered through a Teflon filter (pore diameter 0.2 μm) and used as resist material.
[306]
[307]
[308]
[309] The resist liquid was spun onto a silicon wafer sprayed with hexamethylsilazane at 90 ° C. for 90 seconds, heat treated at 110 ° C. for 90 seconds, and a resist film having a thickness of 0.5 μm was formed. This was exposed using a KrF excimer laser stepper (NA = 0.5, manufactured by Nikon Corporation), heat-treated at 110 ° C. for 90 seconds, and then paddle-developed for 60 seconds with an aqueous solution of 2.38% tetramethylammonium hydroxide, and 1: A line and space pattern of 1 was formed. The developed wafer is cut and observed with a scanning electron microscope (scanning electron microscope), and the line and space separated at an exposure amount (optimal exposure amount = Eop, mJ / cm 2) that resolves a 0.30 μm line and space at 1: 1. The minimum line width (mu m) of was taken as the resolution of the evaluation resist.
[310] The composition and evaluation results of each resist are shown in Table 2. In addition, in Table 2, a solvent and a basic compound are as follows. In addition, the solvent used the thing containing 0.1 weight% of FC-430 (made by Sumitomo 3M Co., Ltd.).
[311]
[312] PGMEA: Propylene glycol methyl ether acetate
[313] TEA: Triethanolamine
[314] TMMEA: Trismethoxy methoxyethylamine
[315] TMEMEA: trismethoxyethoxymethoxyethylamine
[316] From the results in Table 2, it was confirmed that the resist material of the present invention has high sensitivity and high resolution in KrF excimer laser exposure.
[317] Example III
[318] The resolution of ArF excimer laser exposure was evaluated for the resist material of the present invention.
[319] <Example III-1, 2>
[320] Resolution evaluation of resist
[321] The resist material was manufactured by the composition shown in Table 3 similarly to the above.
[322] The resist solution was spun onto a silicon wafer sprayed with hexamethylsilazane at 90 ° C. for 90 seconds, heat treated at 110 ° C. for 90 seconds to form a resist film having a thickness of 0.5 μm. This was exposed using an ArF excimer laser stepper (NA = 0.55, manufactured by Nikon Corporation), heat-treated at 110 ° C. for 90 seconds, and then paddle-developed for 60 seconds with an aqueous solution of 2.38% tetramethylammonium hydroxide, 1 A line and space pattern of: 1 was formed. Observation of the finished wafer was observed with a cross-sectional SEM (scanning electron microscope) to determine the line and space separated by an exposure amount (optimal exposure amount = Eop, mJ / cm 2) that resolves the line and space of 0.25 μm 1: 1. The minimum line width (mu m) was taken as the resolution of the evaluation resist.
[323] The composition and evaluation results of each resist are shown in Table 3 below. In addition, in Table 3, a solvent and a basic compound are as follows. In addition, the solvent used the thing containing 0.1 weight% of FC-430 (made by Sumitomo 3M Co., Ltd.).
[324]
[325] PGMEA: Propylene glycol methyl ether acetate
[326] TEA: Triethanolamine
[327] TMMEA: Trismethoxy methoxyethylamine
[328] From the results in Table 3, it was confirmed that the resist material of the present invention has high sensitivity and high resolution in ArF excimer laser exposure.
[329] Since the resist material using the polymer compound of the present invention as a base resin is sensitive to high energy rays and excellent in sensitivity, resolution, and etching resistance, it is useful for fine processing by electron beams or far ultraviolet rays. In particular, since absorption in the exposure wavelength of ArF excimer laser and KrF excimer laser is small, it has a characteristic that the pattern which is fine and perpendicular | vertical with respect to a board | substrate can be formed easily.

权利要求:
Claims (7)
[1" claim-type="Currently amended] A polymer compound having a weight average molecular weight of 1,000 to 500,000, comprising a repeating unit represented by the following formula (1-1) or (1-2).
<Formula 1-1>

<Formula 1-2>

(In formula, R <^1> represents a hydrogen atom or a C1-C6 linear, branched or cyclic alkyl group, R <^2> represents a hydrogen atom or the C1-C15 acyl group or the alkoxycarbonyl group, and is a constituent carbon atom. Some or all of the hydrogen atoms may be substituted with halogen atoms, Y represents a divalent group having 1 to 15 carbon atoms, and together with the atomic group to which it is bonded form a cyclic structure, k is 0 or 1, m is an integer of 0 to 5 to be)
[2" claim-type="Currently amended] The polymer compound according to claim 1, further comprising a repeating unit represented by the following Chemical Formula 2-1 in addition to the repeating unit represented by the Chemical Formula 1-1.
<Formula 2-1>

(Wherein k is the same as above and R is³Silver hydrogen atom, methyl group or CH₂CO₂R⁵To R⁴Is a hydrogen atom, methyl group or CO₂R⁵Represents R⁵Represents a linear, branched or cyclic alkyl group having 1 to 15 carbon atoms, R⁶Represents an acid labile, R⁷A silver halogen atom, a hydroxyl group, a straight, branched or cyclic alkoxy group having 1 to 15 carbon atoms, an acyloxy group, an alkoxycarbonyloxy group or an alkylsulfonyloxy group, or a straight, branched or cyclic ring having 2 to 15 carbon atoms Represents an alkoxyalkoxy group, and some or all of the hydrogen atoms on the constituent carbon atoms may be substituted with halogen atoms, and Z is a single bond or a linear, branched or cyclic (n + 2) hydrocarbon group having 1 to 5 carbon atoms. In the case of a hydrocarbon group, one or more methylenes may be substituted with oxygen to form a chain or cyclic ether, or two hydrogens of the same carbon may be substituted with oxygen to form a ketone, and n is 0, 1 or 2)
[3" claim-type="Currently amended] The polymer compound according to claim 1, further comprising repeating units represented by the following formulas (2-1) and (3) in addition to the unit represented by the formula (1-1).
<Formula 2-1>

<Formula 3>

(Wherein k, n, Z, R ³ to R ⁷ are the same as above)
[4" claim-type="Currently amended] According to claim 1, wherein in addition to the repeating unit represented by the formula (1-1) containing a repeating unit represented by the following formula (4), or these repeating units of formula (1-1) and formula (4), to the formula (2-1) A polymeric compound characterized by containing a repeating unit represented by and a repeating unit represented by the following formula (3).
<Formula 2-1>

<Formula 3>

<Formula 4>

(Wherein k, n, Z, R ³ to R ⁷ are the same as above)
[5" claim-type="Currently amended] The polymer compound according to claim 1, further comprising a repeating unit represented by the following Formula 2-2 in addition to the repeating unit represented by Formula 1-2.
<Formula 2-2>

(Wherein k, n, Z, R ³ to R ⁷ are the same as above)
[6" claim-type="Currently amended] The resist material characterized by containing the high molecular compound as described in any one of Claims 1-5.
[7" claim-type="Currently amended] The process of apply | coating the resist material of Claim 6 on a board | substrate, the process of exposing with high energy rays or an electron beam through a photomask after heat processing, and the process of developing using a developing solution after heat processing as needed. Pattern forming method comprising a.

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同族专利:

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公开号 | 公开日

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KR100582632B1|2006-05-23|

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US20020091215A1|2002-07-11|

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US6660448B2|2003-12-09|

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TW536665B|2003-06-11|

引用文献:

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公开号 | 申请日 | 公开日 | 申请人 | 专利标题

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法律状态:
2000-11-10|Priority to JPJP-P-2000-00343324

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2000-11-10|Priority to JP2000343324

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2001-11-09|Application filed by 카나가와 치히로, 신에쓰 가가꾸 고교 가부시끼가이샤

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2002-05-16|Publication of KR20020036755A

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2006-05-23|Application granted

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2006-05-23|Publication of KR100582632B1

优先权:

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申请号 | 申请日 | 专利标题

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JPJP-P-2000-00343324|2000-11-10|

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JP2000343324|2000-11-10|